Patents by Inventor Po-Shuo Chen

Po-Shuo Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EUV light source and apparatus for lithography
    Patent number: 11979971
    Abstract: An extreme ultra violet (EUV) radiation source apparatus includes a collector mirror, a target droplet generator for generating a tin (Sn) droplet, a rotatable debris collection device, one or more coils for generating an inductively coupled plasma (ICP), a gas inlet for providing a source gas for the ICP, and a chamber enclosing at least the collector mirror and the rotatable debris collection device. The gas inlet and the one or more coils are configured such that the ICP is spaced apart from the collector mirror.
    Type: Grant
    Filed: April 10, 2019
    Date of Patent: May 7, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yen-Shuo Su, Chun-Lin Chang, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng
  • Method for fabricating image sensors
    Patent number: 8993046
    Abstract: An image sensor is provided. The image sensor includes a pixel sensor, a color filter array comprising a plurality of color filters formed on the pixel sensor, wherein two adjacent color filters have a gap therebetween, and a gapless microlens array comprising a plurality of microlenses formed on the color filter array. The invention also provides a method for fabricating the image sensor.
    Type: Grant
    Filed: October 30, 2012
    Date of Patent: March 31, 2015
    Assignee: VisEra Technologies Company Limited
    Inventor: Po-Shuo Chen
  • Image sensors
    Patent number: 8324701
    Abstract: An image sensor is provided. The image sensor includes a pixel sensor, a color filter array comprising a plurality of color filters formed on the pixel sensor, wherein two adjacent color filters have a gap therebetween, and a gapless microlens array comprising a plurality of microlenses formed on the color filter array. The invention also provides a method for fabricating the image sensor.
    Type: Grant
    Filed: July 16, 2010
    Date of Patent: December 4, 2012
    Assignee: VisEra Technologies Company Limited
    Inventor: Po-Shuo Chen
  • IMAGE SENSORS AND FABRICATION METHOD THEREOF
    Publication number: 20120012959
    Abstract: An image sensor is provided. The image sensor includes a pixel sensor, a color filter array comprising a plurality of color filters formed on the pixel sensor, wherein two adjacent color filters have a gap therebetween, and a gapless microlens array comprising a plurality of microlenses formed on the color filter array. The invention also provides a method for fabricating the image sensor.
    Type: Application
    Filed: July 16, 2010
    Publication date: January 19, 2012
    Applicant: VisEra Technologies Company Limited
    Inventor: Po-Shuo CHEN