Abstract: A defect inspection system is disclosed, and comprises a linear light source, N number of cameras, a display device, a tag reader, and a modular electronic device, in which the linear light source, the cameras and the modular electronic device are used for conducting a defect inspection of an article. On the other hand, the display device, the tag reader and the modular electronic device are adopted for conducting in production of at least one labeled example. Therefore, the modular electronic device is allowed to apply a machine learning process to an image classifier under using a training dataset containing the labeled examples, thereby producing at least one new defect recognition model or updating the existing defect recognition model.

Abstract: A method for calibrating the alignment of a wafer is provided. A plurality of alignment position deviation (APD) simulation results are obtained form a plurality of mark profiles. An alignment analysis is performed on a mark region of the wafer with a light beam. A measured APD of the mark region of the wafer is obtained in response to the light beam. The measured APD is compared with the APD simulation results to obtain alignment calibration data. An exposure process is performed on the wafer with a mask according to the alignment calibration data.

Abstract: A method for calibrating the alignment of a wafer is provided. A plurality of alignment position deviation (APD) simulation results are obtained form a plurality of mark profiles. An alignment analysis is performed on a mark region of the wafer with a light beam. A measured APD of the mark region of the wafer is obtained in response to the light beam. The measured APD is compared with the APD simulation results to obtain alignment calibration data. An exposure process is performed on the wafer with a mask according to the alignment calibration data.

Abstract: A method and a system for controlling a rectifier can obtain a predicted switching interval. The method includes steps of: receiving frequency information and line information of a power generator, the line information including a switching point where a voltage or current crosses zero and a switching interval based on the frequency information; obtaining a predicted switching interval according to the frequency information and the line information, and obtaining a feedback signal according to two terminals of at least one component of the rectifier; and switching a switching signal of the rectifier within the predicted switching interval according to the feedback signal.

Abstract: A method and a system for controlling a rectifier can obtain a predicted switching interval. The method includes steps of: receiving frequency information and line information of a power generator, the line information including a switching point where a voltage or current crosses zero and a switching interval based on the frequency information; obtaining a predicted switching interval according to the frequency information and the line information, and obtaining a feedback signal according to two terminals of at least one component of the rectifier; and switching a switching signal of the rectifier within the predicted switching interval according to the feedback signal.