Patents by Inventor Pohling THEN

Pohling THEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing method
    Patent number: 11437229
    Abstract: A substrate processing method and a substrate processing apparatus are provided, which solve problems of pattern collapse and particles. The substrate processing method includes: a surface modification step of modifying a surface of a substrate having an oxide thereon to improve or reduce roughness of the surface; a surface cleaning step of supplying a treatment liquid to the modified surface of the substrate to clean the surface of the substrate with the treatment liquid; and a hydrophobization step of supplying a hydrophobizing agent to the cleaned surface of the substrate to hydrophobize the surface of the substrate.
    Type: Grant
    Filed: November 19, 2018
    Date of Patent: September 6, 2022
    Inventors: Pohling Then, Kenji Kobayashi, Sadamu Fujii, Taiki Hinode
  • SUBSTRATE PROCESSING METHOD
    Publication number: 20210066071
    Abstract: A substrate processing method and a substrate processing apparatus are provided, which solve problems of pattern collapse and particles. The substrate processing method includes: a surface modification step of modifying a surface of a substrate having an oxide thereon to improve or reduce roughness of the surface; a surface cleaning step of supplying a treatment liquid to the modified surface of the substrate to clean the surface of the substrate with the treatment liquid; and a hydrophobization step of supplying a hydrophobizing agent to the cleaned surface of the substrate to hydrophobize the surface of the substrate.
    Type: Application
    Filed: November 19, 2018
    Publication date: March 4, 2021
    Inventors: Pohling THEN, Kenji KOBAYASHI, Sadamu FUJII, Taiki HINODE