Patents by Inventor Prabal Sen

Prabal Sen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Measurement of inherent substrate distortion
    Patent number: 12704825
    Abstract: A method includes obtaining first data indicative of a measured profile of a substrate. The method further includes obtaining second data indicative of a profile of a reference substrate. The method further includes determining a corrected substrate profile based on the first data and the second data. The method further includes performing a corrective action based on the corrected substrate profile.
    Type: Grant
    Filed: July 18, 2023
    Date of Patent: August 11, 2026
    Assignee: Applied Materials, Inc.
    Inventors: Piyush Kumar Pandey, Prabal Sen, Ganapathy Saravanavel, Himadri Shekhar Handsa, Mohammed Dilkash Azam, Sidharth Bhatia
  • MEASUREMENT OF INHERENT SUBSTRATE DISTORTION
    Publication number: 20250028294
    Abstract: A method includes obtaining first data indicative of a measured profile of a substrate. The method further includes obtaining second data indicative of a profile of a reference substrate. The method further includes determining a corrected substrate profile based on the first data and the second data. The method further includes performing a corrective action based on the corrected substrate profile.
    Type: Application
    Filed: July 18, 2023
    Publication date: January 23, 2025
    Inventors: Piyush Kumar Pandey, Prabal Sen, Ganapathy Saravanavel, Himadri Shekhar Hansda, Mohammed Dilkash Azam, Sidharth Bhatia