Patents by Inventor Prabodh J. Parikh

Prabodh J. Parikh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for endpoint detection during chemical mechanical polishing
    Patent number: 6586337
    Abstract: An apparatus for in situ CMP endpoint detection is presented which includes a probe member for emitting and receiving light signals, a transparent plug mounted over the end of the probe, and a support member located about, and slidably engaged with, the outer circumference of the probe. In use, the plug is inserted into an opening in a polishing pad so that the top of the plug is recessed or coplanar with respect to the polishing surface of the pad and the support member is inserted into an opening in a platen such that a seal is formed between the platen and the support member. The probe member, plug, and/or support member may be disposable and replaceable either alone or in combination.
    Type: Grant
    Filed: November 9, 2001
    Date of Patent: July 1, 2003
    Assignee: SpeedFam-IPEC Corporation
    Inventor: Prabodh J. Parikh
  • Method and apparatus for endpoint detection during chemical mechanical polishing
    Publication number: 20030092269
    Abstract: An apparatus for in situ CMP endpoint detection is presented which includes a probe member for emitting and receiving light signals, a transparent plug mounted over the end of the probe, and a support member located about, and slidably engaged with, the outer circumference of the probe. In use, the plug is inserted into an opening in a polishing pad so that the top of the plug is recessed or coplanar with respect to the polishing surface of the pad and the support member is inserted into an opening in a platen such that a seal is formed between the platen and the support member. The probe member, plug, and/or support member may be disposable and replaceable either alone or in combination.
    Type: Application
    Filed: November 9, 2001
    Publication date: May 15, 2003
    Inventor: Prabodh J. Parikh