Patents by Inventor Pradeep THIRUGNANAM

Pradeep THIRUGNANAM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS FOR PROCESSING A WAFER, AND METHOD OF CONTROLLING SUCH AN APPARATUS
    Publication number: 20220084848
    Abstract: An apparatus for processing a wafer comprises: a rotatable chuck adapted to receive a wafer; a heating assembly comprising an array of light-emitting heating elements arranged to illuminate a wafer received by the rotatable chuck to heat the wafer; and one or more light sensors arranged to detect light emitted by the array of light-emitting heating elements.
    Type: Application
    Filed: January 3, 2020
    Publication date: March 17, 2022
    Inventors: Daniel BRIEN, Pradeep THIRUGNANAM, Matija PONIKVAR, Alois GOLLER