Abstract: An integrated circuit structure includes a first layer comprising silicon and at least one of carbon, oxygen, or hydrogen, and a device layer including a plurality of transistors above the first layer. A first interconnect structure is above the device layer and includes first conductive interconnect features. A second interconnect structure is below the first layer and includes second conductive interconnect features. In an example, one or more of the second conductive interconnect features pass through a bottom surface of the first layer. One or more third conductive interconnect features vertically extend through the device layer to a top surface of the first layer. In an example, the one or more third conductive interconnect features are in contact with the corresponding one or more of the second conductive interconnect features that pass through the bottom surface of the first layer.

Abstract: An in situ approach toward connecting and electrically contacting vertically aligned nanowire arrays using conductive nanoparticles is provided. The utility of the approach is demonstrated by development of a gas sensing device employing the nanowire assembly. Well-aligned, single-crystalline zinc oxide nanowires were grown through a direct thermal evaporation process at 550° C. on gold catalyst layers. Electrical contact to the top of the nanowire array was established by creating a contiguous nanoparticle film through electrostatic attachment of conductive gold nanoparticles exclusively onto the tips of nanowires. A gas sensing device was constructed using such an arrangement and the nanowire assembly was found to be sensitive to both reducing (methanol) and oxidizing (nitrous oxides) gases. This assembly approach is amenable to any nanowire array for which a top contact electrode is needed.

Abstract: An in situ approach toward connecting and electrically contacting vertically aligned nanowire arrays using conductive nanoparticles is provided. The utility of the approach is demonstrated by development of a gas sensing device employing the nanowire assembly. Well-aligned, single-crystalline zinc oxide nanowires were grown through a direct thermal evaporation process at 550° C. on gold catalyst layers. Electrical contact to the top of the nanowire array was established by creating a contiguous nanoparticle film through electrostatic attachment of conductive gold nanoparticles exclusively onto the tips of nanowires. A gas sensing device was constructed using such an arrangement and the nanowire assembly was found to be sensitive to both reducing (methanol) and oxidizing (nitrous oxides) gases. This assembly approach is amenable to any nanowire array for which a top contact electrode is needed.