Patents by Inventor Prajeeth WILTON

Prajeeth WILTON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer swapper
    Patent number: 10518418
    Abstract: The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers.
    Type: Grant
    Filed: January 2, 2018
    Date of Patent: December 31, 2019
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Hari K. Ponnekanti, Sanjeev Baluja, Prajeeth Wilton
  • WAFER SWAPPER
    Publication number: 20180117771
    Abstract: The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers.
    Type: Application
    Filed: January 2, 2018
    Publication date: May 3, 2018
    Inventors: Dale R. DU BOIS, Juan Carlos ROCHA-ALVAREZ, Karthik JANAKIRAMAN, Hari K. PONNEKANTI, Sanjeev BALUJA, Prajeeth WILTON
  • Wafer swapper
    Patent number: 9889567
    Abstract: The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers.
    Type: Grant
    Filed: December 17, 2015
    Date of Patent: February 13, 2018
    Assignee: APPLIED MATERIALS, INC.
    Inventors: Dale R. Du Bois, Juan Carlos Rocha-Alvarez, Karthik Janakiraman, Hari K. Ponnekanti, Sanjeev Baluja, Prajeeth Wilton
  • WAFER SWAPPER
    Publication number: 20160314995
    Abstract: The present disclosure generally relates to semiconductor process equipment used to transfer semiconductor substrates between process chambers. More specifically, embodiments described herein are related to systems and methods used to transfer, or swap, semiconductor substrates between process chambers using a transport device that employs at least two blades for the concurrent transfer of substrates between processing chambers.
    Type: Application
    Filed: December 17, 2015
    Publication date: October 27, 2016
    Inventors: Dale R. DU BOIS, Juan Carlos ROCHA-ALVAREZ, Karthik JANAKIRAMAN, Hari K. PONNEKANTI, Sanjeev BALUJA, Prajeeth WILTON