Patents by Inventor Prakash Ravanan

Prakash Ravanan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Live measurement of high voltage power supply output
    Patent number: 11863089
    Abstract: Process chamber, high voltage measurement systems and methods for monitoring the output of a high voltage power supply are described. The output of the high voltage power supply is converted using a transducer and measured with high accuracy. A high voltage measurement system compares the converted value with a threshold criterion and actuates an interlock if readings are outside the threshold.
    Type: Grant
    Filed: March 26, 2021
    Date of Patent: January 2, 2024
    Assignee: Applied Materials, Inc.
    Inventor: Prakash Ravanan
  • LIVE MEASUREMENT OF HIGH VOLTAGE POWER SUPPLY OUTPUT
    Publication number: 20220311361
    Abstract: Process chamber, high voltage measurement systems and methods for monitoring the output of a high voltage power supply are described. The output of the high voltage power supply is converted using a transducer and measured with high accuracy. A high voltage measurement system compares the converted value with a threshold criterion and actuates an interlock if readings are outside the threshold.
    Type: Application
    Filed: March 26, 2021
    Publication date: September 29, 2022
    Applicant: Applied Materials, Inc.
    Inventor: Prakash Ravanan