Patents by Inventor Pranav Gopal

Pranav Gopal has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220084845
    Abstract: Exemplary semiconductor processing chambers may include showerhead. The chambers may include a pedestal configured to support a semiconductor substrate, where the showerhead and pedestal at least partially define a processing region within the semiconductor chamber. The chamber may include a spacer characterized by a first surface in contact with the showerhead and a second surface opposite the first surface. The chamber may include a pumping liner characterized by a first surface in contact with the spacer and a second surface opposite the first surface. The pumping liner may define a plurality of apertures within the first surface of the pumping liner.
    Type: Application
    Filed: September 17, 2020
    Publication date: March 17, 2022
    Applicant: Applied Materials, Inc.
    Inventors: Samartha Subramanya, Dmitry Lubomirsky, Mehmet Tugrul Samir, Lala Zhu, Martin Y. Choy, Son T. Nguyen, Pranav Gopal