Patents by Inventor Praneeth Ramasagaram

Praneeth Ramasagaram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CONFORMAL THERMAL CVD WITH CONTROLLED FILM PROPERTIES AND HIGH DEPOSITION RATE
    Publication number: 20230245896
    Abstract: Methods and apparatuses for depositing dielectric films into features on semiconductor substrates are described herein. Methods involve depositing dielectric films by using controlled thermal chemical vapor deposition, with periodic passivation operations and densification to modulate film properties.
    Type: Application
    Filed: July 21, 2021
    Publication date: August 3, 2023
    Inventors: Awnish Gupta, Bart J. Van Schravendijk, Frank Loren Pasquale, Adrien LaVoie, Jason Alexander Varnell, Praneeth Ramasagaram, Joseph R. Abel, Jennifer Leigh Petraglia, Dustin Zachary Austin