Patents by Inventor Prashani Raghu

Prashani Raghu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20090305511
    Abstract: Some embodiments include methods of treating semiconductor substrates. The substrates may be exposed to one or more conditions that vary continuously. The conditions may include temperature gradients, concentration gradients of one or more compositions that quench etchant, pH gradients to assist in removing particles, and/or concentration gradients of one or more compositions that assist in removing particles. The continuously varying conditions may be imparted by placing the semiconductor substrates in a bath of flowing rinsing solution, with the bath having at least two feed lines that provide the rinsing solution therein. One of the feed lines may be at a first condition, and the other may be at a second condition that is different from the first condition. The relative amount of rinsing solution provided to the bath by each feed line may be varied to continuously vary the condition within the bath.
    Type: Application
    Filed: June 10, 2008
    Publication date: December 10, 2009
    Inventors: Janos Fucsko, Niraj B. Rana, Sandra Tagg, Robert J. Hanson, Gundu M. Sabde, Donald L. Yates, Patrick M. Flynn, Prashani Raghu, Kyle Grant