Patents by Inventor Prashant A. Aji

Prashant A. Aji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20170161418
    Abstract: Various embodiments for using three-dimensional representations for defect-related applications are provided. One computer-implemented method for determining one or more inspection parameters for a wafer inspection recipe includes generating a three-dimensional representation of one or more layers of a wafer based on design data. The method also includes determining one or more inspection parameters for a wafer inspection recipe based on the three-dimensional representation.
    Type: Application
    Filed: February 20, 2017
    Publication date: June 8, 2017
    Inventors: Allen Park, Ellis Chang, Prashant A. Aji, Steven R. Lange
  • Patent number: 9645097
    Abstract: Disclosed are methods and apparatus for inspecting and processing semiconductor wafers. The system includes an edge detection system for receiving each wafer that is to undergo a photolithography process. The edge detection system comprises an illumination channel for directing one or more illumination beams towards a side, top, and bottom edge portion that are within a border region of the wafer. The edge detection system also includes a collection module for collecting and sensing output radiation that is scattered or reflected from the edge portion of the wafer and an analyzer module for locating defects in the edge portion and determining whether each wafer is within specification based on the sensed output radiation for such wafer. The photolithography system is configured for receiving from the edge detection system each wafer that has been found to be within specification. The edge detection system is coupled in-line with the photolithography system.
    Type: Grant
    Filed: June 17, 2015
    Date of Patent: May 9, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant A. Aji, Michael Gasvoda, Stanley E. Stokowski, Guoheng Zhao, Youxian Wen, Mohan Mahadevan, Paul D. Horn, Wolfgang Vollrath, Isabella T. Lewis
  • Publication number: 20150370175
    Abstract: Disclosed are methods and apparatus for inspecting and processing semiconductor wafers. The system includes an edge detection system for receiving each wafer that is to undergo a photolithography process. The edge detection system comprises an illumination channel for directing one or more illumination beams towards a side, top, and bottom edge portion that are within a border region of the wafer. The edge detection system also includes a collection module for collecting and sensing output radiation that is scattered or reflected from the edge portion of the wafer and an analyzer module for locating defects in the edge portion and determining whether each wafer is within specification based on the sensed output radiation for such wafer. The photolithography system is configured for receiving from the edge detection system each wafer that has been found to be within specification. The edge detection system is coupled in-line with the photolithography system.
    Type: Application
    Filed: June 17, 2015
    Publication date: December 24, 2015
    Applicant: KLA-Tencor Corporation
    Inventors: Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant A. Aji, Michael Gasvoda, Stanley E. Stokowski, Guoheng Zhao, Youxian Wen, Mohan Mahadevan, Paul D. Horn, Wolfgang Vollrath, Isabella T. Lewis
  • Publication number: 20120316855
    Abstract: Various embodiments for using three-dimensional representations for defect-related applications are provided.
    Type: Application
    Filed: June 8, 2011
    Publication date: December 13, 2012
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Allen Park, Ellis Chang, Prashant A. Aji, Steven R. Lange
  • Patent number: 7283659
    Abstract: Disclosed are methods and apparatus for automatically organizing and/or analyzing a plurality of defect images without first providing a predefined set of classified images (herein referred to as a training set). In other words, sorting is not based on a training set or predefined classification codes for such defect images. In one embodiment, the defect images each include associated identifying data, such as a fabrication identifier, lot number, wafer number, and layer identifier. Initially, the defect images are sorted according to at least a portion of the associated identifying data into a plurality of “identifying data groups” or image families. The defect data in each identifying data group is then automatically sorted according to defect appearance. That is, similar defect images are associated with a single bin and similar bins are associated with other similar bins. For example, similar bins are arranged next to each other within a graphical user interface (GUI).
    Type: Grant
    Filed: June 18, 2002
    Date of Patent: October 16, 2007
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: David R. Bakker, Prashant A. Aji, James L. Belliveau, Chacko C. Neroth
  • Patent number: 7072786
    Abstract: Techniques for efficiently setting up inspection, metrology, and review systems for operating upon semiconductor wafers are described. Specifically, this involves setting up recipes that allows each system to accurately inspect semiconductor wafers. The invention gathers pertinent information from these tools and presents the information to users in a way that greatly reduces the time required to complete a recipe. One system embodiment includes an inspection system and a review station that is communicatively linked such that the review station can read from and write to an entire set of data stored at the inspection system. The set of data includes image files of features detected by the inspection system.
    Type: Grant
    Filed: September 28, 2005
    Date of Patent: July 4, 2006
    Assignee: KLA-Tencor Technologies, Corporation
    Inventors: David Bruce Coldren, Prashant A. Aji, David Winslow Randall, Sharon Marie McCauley
  • Patent number: 6959251
    Abstract: Techniques for efficiently setting up inspection, metrology, and review systems for operating upon semiconductor wafers are described. Specifically, this involves setting up recipes that allows each system to accurately inspect semiconductor wafers. The invention gathers pertinent information from these tools and presents the information to users in a way that greatly reduces the time required to complete a recipe. One system embodiment includes an inspection system and a review station that is communicatively linked such that the review station can read from and write to an entire set of data stored at the inspection system. The set of data includes image files of features detected by the inspection system.
    Type: Grant
    Filed: November 14, 2002
    Date of Patent: October 25, 2005
    Assignee: KLA-Tencor Technologies, Corporation
    Inventors: David Bruce Coldren, Prashant A. Aji, David Winslow Randall, Sharon Marie McCauley
  • Publication number: 20040038454
    Abstract: Techniques for efficiently setting up inspection, metrology, and review systems for operating upon semiconductor wafers are described. Specifically, this involves setting up recipes that allows each system to accurately inspect semiconductor wafers. The invention gathers pertinent information from these tools and presents the information to users in a way that greatly reduces the time required to complete a recipe. One system embodiment includes an inspection system and a review station that is communicatively linked such that the review station can read from and write to an entire set of data stored at the inspection system. The set of data includes image files of features detected by the inspection system.
    Type: Application
    Filed: November 14, 2002
    Publication date: February 26, 2004
    Applicant: KLA-Tencor Technologies Corporation
    Inventors: David Bruce Coldren, Prashant A. Aji, David Winslow Randall, Sharon Marie McCauley