Abstract: The disclosure is directed to a device interface, system and method for connecting a Tester Interface Unit (TIU) to an automated test equipment that enable data rates of over 1.0 Gbps over scalable high speed cables. The device interface includes at least one flange assembly connecting an electron beam probe (EBP) in a vacuum-controlled environment to an ambient environment, the flange assembly including a vacuum-controlled passthrough environment coupled to the EBP, a plurality of cables coupled to a plurality of connectors within the vacuum-controlled passthrough environment to provide power, control and signal connections to the ambient environment, the plurality cables including plurality of hermetically-sealed printed circuit boards (PCBs) carrying digital high speed signals from the TIU, a plurality of power cables supporting a plurality of power requirements, and a plurality of ATE communication control cables to direct the TIU.

Abstract: This disclosure describes systems, methods, and devices related to electron beam and nanoprobing techniques with probe tips for fault isolation in integrated circuits. A method may include generating a signal at a circuit device under test while a probe tip electrically interacts with a transistor of the circuit device under test; detecting, based on the signal and the laser at the transistor, an electrical output of the circuit device under test; and identifying, based on the electrical output, a location of a fault at the circuit device under test.

Abstract: Pulsed beam prober systems, devices, and techniques are described herein related to providing a beam detection frequency that is less than a electrical test frequency. An electrical test signal at the electrical test frequency is provided to die under test. A pulsed beam is applied to the die such that the pulsed beam has packets of beam pulses or a frequency delta with respect to the electrical test frequency. The packets of beam pulses or the frequency delta elicits a detectable beam modulation in an imaging signal reflected from the die such that the imaging signal is modulated at a detection frequency less than the electrical test frequency.