Patents by Inventor Prasoon SHUKLA

Prasoon SHUKLA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20210020484
    Abstract: Methods and apparatus for a PVD chamber are provided herein. In some embodiments, a selective PVD chamber includes a first housing surrounding a movable substrate support; a second housing adjacent the first housing; an opening disposed between the first housing and the second housing that partially exposes a top surface of the movable substrate support, wherein the opening includes a first curved side; and an elongate target disposed in the second housing to provide a stream of material flux from the elongate target into the first housing via the opening.
    Type: Application
    Filed: June 26, 2020
    Publication date: January 21, 2021
    Inventors: Keith Miller, Farzad HOUSHMAND, Prasoon SHUKLA