Patents by Inventor Pratik Jacob Mankidy

Pratik Jacob Mankidy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • TAPERED UPPER ELECTRODE FOR UNIFORMITY CONTROL IN PLASMA PROCESSING
    Publication number: 20190244793
    Abstract: An upper electrode for use in a substrate processing system includes a lower surface. The lower surface includes a first portion and a second portion and is plasma-facing. The first portion includes a first surface region that has a first thickness. The second portion includes a second surface region that has a varying thickness such that the second portion transitions from a second thickness to the first thickness.
    Type: Application
    Filed: February 5, 2018
    Publication date: August 8, 2019
    Inventors: Zhigang Chen, Alexei Marakhtanov, John Holland, Pratik Jacob Mankidy, Anthony Dela Llera, Haley Kim, Hyungjoo Shin