Patents by Inventor Preetham Prahallada Rao

Preetham Prahallada Rao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • VIRTUAL MEASUREMENT OF CONDITIONS PROXIMATE TO A SUBSTRATE WITH PHYSICS-INFORMED COMPRESSED SENSING
    Publication number: 20230078146
    Abstract: A method includes measuring a subset of property values within a manufacturing chamber during a process performed on a substrate within the manufacturing chamber. The method further includes determining property values in the manufacturing chamber at locations removed from the locations the measurements are taken. The method further includes performing a corrective action based on the determined properties.
    Type: Application
    Filed: September 15, 2021
    Publication date: March 16, 2023
    Inventors: Preetham Prahallada Rao, Prashanth Kothnur