Patents by Inventor Premendra

Premendra has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sputtering magnetron assembly
    Patent number: 9093251
    Abstract: The present invention concerns a sputtering magnetron assembly comprising a rotatable tubular target cathode and a magnetic field generating device installed within the tubular target cathode. At least part of the magnetic field generating device is configured to move within the tubular target cathode so as to maintain within a predetermined range a magnetic field strength at an outer surface of the tubular target cathode during erosion of said outer surface. The present invention also relates to a physical vapour deposition method using such a sputtering magnetron assembly.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: July 28, 2015
    Assignee: TOYOTA MOTOR EUROPE NV/SA
    Inventor: Premendra
  • SPUTTERING MAGNETRON ASSEMBLY
    Publication number: 20120211352
    Abstract: The present specification concerns a sputtering magnetron assembly 104,204,304 comprising a rotatable tubular target cathode 105,205,305 and a magnetic field generating device 106,206,306 installed within the tubular target cathode 105,205,305. At least part of the magnetic field generating device 106,206,306 is configured to move within the tubular target cathode 105,205,305 so as to maintain within a predetermined range a magnetic field strength H at an outer surface 110,210,310 of the tubular target cathode 105,205,305 during erosion of said outer surface. The present specification also relates to a physical vapour deposition method using such a sputtering magnetron assembly 104,204,304.
    Type: Application
    Filed: February 18, 2011
    Publication date: August 23, 2012
    Applicant: TOYOTA MOTOR EUROPE NV/SA
    Inventor: Premendra