Patents by Inventor Prerna A. GORADIA

Prerna A. GORADIA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR ELECTROCHEMICALLY GROWN YTTRIA OR YTTRIUM OXIDE ON SEMICONDUCTOR PROCESSING EQUIPMENT
    Publication number: 20170260618
    Abstract: The present disclosure generally relates to methods of electro-chemically forming yttria or yttrium oxide. The methods may include the optional preparation of a an electrochemical bath, the electrodepositon of yttria or yttrium oxide onto a substrate, removal of solvent form the surface of the substrate, and post treatment of the substrate having the electrodeposited yttria or yttrium oxide thereon.
    Type: Application
    Filed: March 7, 2017
    Publication date: September 14, 2017
    Inventors: Laksheswar KALITA, Prerna A. GORADIA, Geetika BAJAJ, Yogita PAREEK, Yixing LIN, Dmitry LUBOMIRSKY, Ankur KADAM, Bipin THAKUR, Kevin A. PAPKE, Kaushik VAIDYA
  • ALUMINUM ELECTROPLATING AND OXIDE FORMATION AS BARRIER LAYER FOR ALUMINUM SEMICONDUCTOR PROCESS EQUIPMENT
    Publication number: 20170260639
    Abstract: The present disclosure generally relates to methods of electro-chemically forming aluminum or aluminum oxide. The methods may include the optional preparation of a an electrochemical bath, the electrodepositon of aluminum or aluminum oxide onto a substrate, removal of solvent form the surface of the substrate, and post treatment of the substrate having the electrodeposited aluminum or aluminum oxide thereon.
    Type: Application
    Filed: March 7, 2017
    Publication date: September 14, 2017
    Inventors: Yogita PAREEK, Laksheswar KALITA, Geetika BAJAJ, Kevin A. PAPKE, Ankur KADAM, Bipin THAKUR, Yixing LIN, Dmitry LUBOMIRSKY, Prerna A. GORADIA