Patents by Inventor Princess E. Simpson

Princess E. Simpson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Resolution confocal microscope, and device fabrication method using same
    Patent number: 5078482
    Abstract: A new confocal microscope and a new device fabrication method in which linewidth control is achieved using the new confocal microscope are disclosed. This new confocal microscope has a configuration which achieves multiple passes, e.g., three, four, five, six, seven or more passes, of the incident light through the objective lens of the microscope. As a consequence, the new confocal microscope exhibits a smaller effective depth of focus and a smaller effective resolution than a conventional confocal microscope.
    Type: Grant
    Filed: January 3, 1991
    Date of Patent: January 7, 1992
    Assignee: AT&T Bell Laboratories
    Inventors: Martin Feldman, Princess E. Simpson
  • Resolution confocal microscope, and device fabrication method using same
    Patent number: 5004321
    Abstract: A new confocal microscope and a new device fabrication method in which linewidth control is achieved using the new confocal microscope are disclosed. This new confocal microscope has a configuration which achieves multiple passes, e.g., three, four, five, six, seven or more passes, of the incident light through the objective lens of the microscope. As a consequence, the new confocal microscope exhibits a smaller effective depth of focus and a smaller effective resolution than a conventional confocal microscope.
    Type: Grant
    Filed: July 28, 1989
    Date of Patent: April 2, 1991
    Assignee: AT&T Bell Laboratories
    Inventors: Martin Feldman, Princess E. Simpson