Patents by Inventor Prudhvi R. Chintalapati

Prudhvi R. Chintalapati has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic end effector apparatus, systems and methods
    Patent number: 8599531
    Abstract: Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.
    Type: Grant
    Filed: January 8, 2010
    Date of Patent: December 3, 2013
    Assignee: Applied Materials, Inc.
    Inventors: Satish Sundar, Jeffrey C. Hudgens, Prudhvi R. Chintalapati, William Nixon Taylor, Jr., William P. Laceky, Jeffrey A. Brodine, Dean C. Hruzek, Mario Dave Silvetti
  • ELECTROSTATIC END EFFECTOR APPARATUS, SYSTEMS AND METHODS
    Publication number: 20100178139
    Abstract: Systems, apparatus and methods for transporting substrates between system components of an electronic device manufacturing system are provided. The systems and apparatus include an electrostatic end effector having a base, an electrode pair on the base, and spacer members for spacing the substrate from the electrode pairs to provide a gap between the electrode pair and the substrate. Methods of the invention as well as numerous other aspects are provided.
    Type: Application
    Filed: January 8, 2010
    Publication date: July 15, 2010
    Applicant: Applied Materials, Inc.
    Inventors: Satish Sundar, Jeffrey C. Hudgens, Prudhvi R. Chintalapati, William Nixon Taylor, JR., William P. Laceky, Jeffrey A. Brodine, Dean C. Hruzek, Mario Dave Silvetti
  • SYSTEMS, APPARATUS AND METHODS FOR MOVING SUBSTRATES
    Publication number: 20100178137
    Abstract: Systems, methods and apparatus are provided for moving substrates in electronic device manufacturing. In some aspects, end effectors having a base portion and at least three pads are provided. Each of the pads has a contact surface, and at least one of the contact surfaces has a curved shape. A substrate supported by the end effector may be moved at a relatively high lateral g-force without significant slipping relative to the pads. Additional aspects are provided.
    Type: Application
    Filed: January 8, 2010
    Publication date: July 15, 2010
    Applicant: Applied Materials, Inc.
    Inventors: Prudhvi R. Chintalapati, Satish Sundar, Boris Axelrod, Mario Dave Silvetti, Tom K. Cho, Jeffrey A. Brodine, Jason K. Foster, Edward Ng