Patents by Inventor Pui Leung

Pui Leung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11835752
    Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
    Type: Grant
    Filed: October 9, 2020
    Date of Patent: December 5, 2023
    Assignee: ASML HOLDING N.V.
    Inventors: King Pui Leung, Tao Chen, Ronan James Havelin, Igor Matheus Petronella AARTS, Adel Joobeur, Joseph Carbone
  • Publication number: 20210033779
    Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
    Type: Application
    Filed: October 9, 2020
    Publication date: February 4, 2021
    Applicant: ASML HOLDING N.V.
    Inventors: King Pui LEUNG, Tao CHEN, Ronan James HAVELIN, Igor Matheus Petronella AARTS, Adel JOOBEUR, Joseph CARBONE
  • Patent number: 10802208
    Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
    Type: Grant
    Filed: March 17, 2017
    Date of Patent: October 13, 2020
    Assignee: ASML Holding N.V.
    Inventors: King Pui Leung, Tao Chen, Ronan James Havelin, Igor Matheus Petronella Aarts, Adel Joobeur, Joseph Carbone
  • Patent number: 10670978
    Abstract: A spectrally broadened radiation apparatus, including a laser configured to emit, through an output of the laser, radiation substantially only in the visible region of the electromagnetic spectrum, the radiation having a nominal wavelength, and an optical fiber optically coupled to the output of the laser, the optical fiber having an input to receive the radiation from the laser and having an output to provide spectrally broadened output radiation, the optical fiber configured to spectrally broaden the radiation from the laser to a spectral width of at least 0.5 nm around the nominal wavelength.
    Type: Grant
    Filed: August 11, 2015
    Date of Patent: June 2, 2020
    Assignee: ASML Holding N.V.
    Inventors: King Pui Leung, Tao Chen, Kevin J. Violette
  • Publication number: 20190154910
    Abstract: A measurement apparatus, including: a tapered optical fiber, the tapered optical fiber having an input to receive radiation and having an output to provide spectrally broadened output radiation toward a measurement target, the tapered optical fiber configured to spectrally broaden the radiation received at the input; and a detector system configured to receive a redirected portion of the output radiation from the measurement target.
    Type: Application
    Filed: March 17, 2017
    Publication date: May 23, 2019
    Applicant: ASML HOLDING N.V.
    Inventors: King Pui LEUNG, Tao CHEN, James Ronan HAVELIN, Igor Matheus Petronella AARTS, Adel JOOBEUR, Joseph CARBONE
  • Patent number: 10082740
    Abstract: An alignment system having long term stability in illumination center wavelength is discussed. The alignment system includes a tunable radiation source and a feedback control system. The tunable radiation source includes a light source configured to provide a broadband radiation beam and a tunable multi-passband filter configured to filter the broadband radiation beam into narrow band radiation beam having a center wavelength value. The feedback control system is configured to measure the center wavelength value of the narrow band radiation beam and compare the measured center wavelength value with a desired center wavelength value. The feedback control system is further configured to generate a control signal based on the comparison in response to a difference being present between the measured center wavelength value and the desired center wavelength value and tune the tunable filter based on the control signal to eliminate or substantially reduce the difference.
    Type: Grant
    Filed: November 26, 2015
    Date of Patent: September 25, 2018
    Assignee: ASML Holding N.V.
    Inventors: Tao Chen, King Pui Leung, Kevin J. Violette
  • Publication number: 20170357166
    Abstract: An alignment system having long term stability in illumination center wavelength is discussed. The alignment system includes a tunable radiation source and a feedback control system. The tunable radiation source includes a light source configured to provide a broadband radiation beam and a tunable multi-passband filter configured to filter the broadband radiation beam into narrow band radiation beam having a center wavelength value. The feedback control system is configured to measure the center wavelength value of the narrow band radiation beam and compare the measured center wavelength value with a desired center wavelength value. The feedback control system is further configured to generate a control signal based on the comparison in response to a difference being present between the measured center wavelength value and the desired center wavelength value and tune the tunable filter based on the control signal to eliminate or substantially reduce the difference.
    Type: Application
    Filed: November 26, 2015
    Publication date: December 14, 2017
    Applicant: ASML Holding N.V.
    Inventors: Tao CHEN, King Pui LEUNG, Kevin J. VIOLETTE
  • Publication number: 20170277046
    Abstract: A spectrally broadened radiation apparatus, including a laser configured to emit, through an output of the laser, radiation substantially only in the visible region of the electromagnetic spectrum, the radiation having a nominal wavelength, and an optical fiber optically coupled to the output of the laser, the optical fiber having an input to receive the radiation from the laser and having an output to provide spectrally broadened output radiation, the optical fiber configured to spectrally broaden the radiation from the laser to a spectral width of at least 0.5 nm around the nominal wavelength.
    Type: Application
    Filed: August 11, 2015
    Publication date: September 28, 2017
    Applicant: ASML HOLDING N.V.
    Inventors: King Pui LEUNG, Tao CHEN, Kevin J. VIOLETTE
  • Publication number: 20060129788
    Abstract: The unique identifier (UID) boot system provides a system and method for booting a network connected processing system. Briefly described, one embodiment is a method comprising receiving a UID, the UID uniquely identifying the network connected processing system; determining a directory structure from a first portion of the UID, the directory structure identifying a memory location in a network accessible memory wherein a UID script file resides, the UID script file comprising additional script that causes the network connected processing system to retrieve at least one resource information file; and determining a file name from a second portion of the UID, the file name identifying the UID script file.
    Type: Application
    Filed: December 15, 2004
    Publication date: June 15, 2006
    Inventors: Masato Maeda, Pui Leung, Gregory Sorknes, James Frye
  • Patent number: 6440384
    Abstract: Composition of matter useful as an active mass of positive electrodes for a lead acid storage cell has an X-ray diffraction pattern substantially as shown in the. Figure. The matter is formed from lead-cadmium deposits using a methanesulfonic acid electrolyte system and pulse current.
    Type: Grant
    Filed: February 21, 2000
    Date of Patent: August 27, 2002
    Assignee: Hong Kong Polytechnic University
    Inventors: Tin Pui Leung, Ho Ching Wong, Wah-Sing Miu
  • Patent number: 6022468
    Abstract: The method is provided for hardening carbon steel by using electrolysis and a pulsed direct current supply.
    Type: Grant
    Filed: November 10, 1997
    Date of Patent: February 8, 2000
    Inventors: Suet Fan Luk, Tin Pui Leung, Wah Sing Miu, Ian Robert Pashby
  • Patent number: D394079
    Type: Grant
    Filed: July 9, 1997
    Date of Patent: May 5, 1998
    Assignee: Stelex Electronics Company Limited
    Inventor: Szu Pui Leung
  • Patent number: D398627
    Type: Grant
    Filed: July 9, 1997
    Date of Patent: September 22, 1998
    Assignee: Stelex Electronics Company Limited
    Inventor: Szu Pui Leung