Patents by Inventor Puneet H. Suvarna

Puneet H. Suvarna has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11038092
    Abstract: Structures that include semiconductor fins and methods for forming a structure that includes semiconductor fins. A first fin comprised of n-type semiconductor material and a second fin comprised of p-type semiconductor material are formed. A conductive strap is formed that couples an end of the first fin with an end of the second fin.
    Type: Grant
    Filed: June 21, 2019
    Date of Patent: June 15, 2021
    Assignee: GLOBALFOUNDRIES U.S. INC.
    Inventors: Philipp Steinmann, Puneet H. Suvarna
  • Publication number: 20190319180
    Abstract: Structures that include semiconductor fins and methods for forming a structure that includes semiconductor fins. A first fin comprised of n-type semiconductor material and a second fin comprised of p-type semiconductor material are formed.
    Type: Application
    Filed: June 21, 2019
    Publication date: October 17, 2019
    Inventors: Philipp Steinmann, Puneet H. Suvarna
  • Patent number: 10256158
    Abstract: Integrated circuit structures include isolation elements extending into a substrate, and source/drain regions of a first transistor contacting the isolation elements. The isolation elements extend from the substrate to the source/drain regions of the first transistor. Isolation layers contact the source/drain regions of the first transistor, and source/drain regions of a second transistor also contact the isolation layers. Thus, the isolation layers are between the source/drain regions of the first transistor and the source/drain regions of the second transistor. Channel regions of the first transistor contact and extend between the source/drain regions of the first transistor, and channel regions of the second transistor contact and extend between the source/drain regions of the second transistor. A gate conductor surrounds sides of the channel region of the first transistor and the channel region of the second transistor.
    Type: Grant
    Filed: November 22, 2017
    Date of Patent: April 9, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Julien Frougier, Ruilong Xie, Steven Bentley, Puneet H. Suvarna
  • Patent number: 10236292
    Abstract: The present disclosure relates generally to wrap around contact formation in source/drain regions of a semiconductor device such as an integrated circuit (IC), and more particularly, to stacked IC structures containing complementary FETs (CFETs) having wrap around contacts and methods of forming the same. Disclosed is a stacked IC structure including a first FET on a substrate, a second FET vertically stacked above the first FET, a dielectric layer above the second FET, and a spacer layer between FETs, wherein each FET has an electrically isolated wrap-around contact formed therearound.
    Type: Grant
    Filed: October 10, 2018
    Date of Patent: March 19, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Julien Frougier, Ruilong Xie, Puneet H. Suvarna, Hiroaki Niimi, Steven J. Bentley, Ali Razavieh
  • Patent number: 10192867
    Abstract: The present disclosure relates generally to wrap around contact formation in source/drain regions of a semiconductor device such as an integrated circuit (IC), and more particularly, to stacked IC structures containing complementary FETs (CFETs) having wrap around contacts and methods of forming the same. Disclosed is a stacked IC structure including a first FET on a substrate, a second FET vertically stacked above the first FET, a dielectric layer above the second FET, and a spacer layer between FETs, wherein each FET has an electrically isolated wrap-around contact formed therearound.
    Type: Grant
    Filed: February 5, 2018
    Date of Patent: January 29, 2019
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Julien Frougier, Ruilong Xie, Puneet H. Suvarna, Hiroaki Niimi, Steven J. Bentley, Ali Razavieh
  • Publication number: 20180366372
    Abstract: Embodiments of the disclosure provide integrated circuit (IC) structures with stepped epitaxial regions and methods of forming the same. A method according to the disclosure can include: removing a portion of a substrate to form a recess therein, the portion of the substrate being laterally adjacent to a semiconductor fin having a sidewall spacer thereon, to expose an underlying sidewall of the semiconductor fin; forming an epitaxial layer within the recess, such that the epitaxial layer laterally abuts the sidewall of the semiconductor fin below the sidewall spacer; removing a portion of the epitaxial layer to form a stepped epitaxial region adjacent to the semiconductor fin, the stepped epitaxial region including a first region laterally abutting the sidewall of the semiconductor fin, and a second region laterally adjacent to the first region; and forming a gate structure over the stepped epitaxial region and adjacent to the semiconductor fin.
    Type: Application
    Filed: June 19, 2017
    Publication date: December 20, 2018
    Inventors: Puneet H. Suvarna, Steven Bentley, Mark V. Raymond, Peter M. Zeitzoff
  • Patent number: 10157794
    Abstract: Embodiments of the disclosure provide integrated circuit (IC) structures with stepped epitaxial regions and methods of forming the same. A method according to the disclosure can include: removing a portion of a substrate to form a recess therein, the portion of the substrate being laterally adjacent to a semiconductor fin having a sidewall spacer thereon, to expose an underlying sidewall of the semiconductor fin; forming an epitaxial layer within the recess, such that the epitaxial layer laterally abuts the sidewall of the semiconductor fin below the sidewall spacer; removing a portion of the epitaxial layer to form a stepped epitaxial region adjacent to the semiconductor fin, the stepped epitaxial region including a first region laterally abutting the sidewall of the semiconductor fin, and a second region laterally adjacent to the first region; and forming a gate structure over the stepped epitaxial region and adjacent to the semiconductor fin.
    Type: Grant
    Filed: June 19, 2017
    Date of Patent: December 18, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Puneet H. Suvarna, Steven Bentley, Mark V. Raymond, Peter M. Zeitzoff
  • Publication number: 20180342661
    Abstract: Structures that include semiconductor fins and methods for forming a structure that includes semiconductor fins. A first fin comprised of n-type semiconductor material and a second fin comprised of p-type semiconductor material are formed. A conductive strap is formed that couples an end of the first fin with an end of the second fin.
    Type: Application
    Filed: May 25, 2017
    Publication date: November 29, 2018
    Inventors: Philipp Steinmann, Puneet H. Suvarna
  • Patent number: 10121702
    Abstract: At least one method, apparatus and system disclosed herein involves performing an early-process of source/drain (S/D) contact cut and S/D contact etch steps for manufacturing a finFET device. A gate structure, a source structure, and a drain structure of a transistor are formed. The gate structure comprises a dummy gate region, a gate spacer, and a liner. A source/drain (S/D) contact cut process is performed. An S/D contact etch process is performed. A replacement metal gate (RMG) process is performed subsequent to performing the S/D contact etch process. An S/D contact metallization process is performed.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: November 6, 2018
    Assignee: GLOBALFOUNDRIES INC.
    Inventors: Chanro Park, Min Gyu Sung, Ruilong Xie, Puneet H. Suvarna