Abstract: A semiconductor equipment control system and method is provided. The semiconductor equipment control system preferably includes semiconductor equipment having a process recipe stored therein and a host connected to the semiconductor equipment through a network. The host preferably includes a database in which a reference recipe is stored and is preferably configured to receive and compare a final modification time of the process recipe with a final modification time of the reference recipe. When the final modifications times are equal, the host is preferably configured to instruct the semiconductor equipment to perform a process according to the process recipe. When the final modification times are different, the host is preferably configured to check a recipe body of the process recipe against a recipe body of the reference recipe to determine if the process recipe is within an established tolerance.

Abstract: A method for controlling equipment in a semiconductor fabrication system includes automatically receiving operating data from equipment in a semiconductor fabrication system indicating operating conditions of units of the equipment. Reference data corresponding to the equipment are retrieved from a data base and indicate operating ranges for the respective units. It is then determined whether the operating conditions are within the operating ranges for the respective units. If the operating conditions are within the operating range for all the units, the method returns to automatically receiving operating state data. If the operating conditions are not within the operating range for a certain unit, in a variable ID a key value corresponding to the certain unit is changed indicating a change in the operating state. The operating state of the unit is then actually modified by inserting the variable ID into a equipment control message and downloading the equipment control message into the equipment.