Abstract: Provided are an examination apparatus and a method of examining a semiconductor device. The examination apparatus includes a support on which a semiconductor device to be examined is disposed, a light irradiation unit that obliquely emits light at a set angle to the support, an image capturing member configured to capture an image of an upper surface of the support, and a control member configured to determine, based on the image captured by the image capturing member, whether a height of the semiconductor device is standard by using the set angle and an examination pattern formed on the semiconductor device by the light.