Patents by Inventor Q Han Park

Q Han Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11048025
    Abstract: The present disclosure discloses an anti-reflection coating and a method of forming the same. According to one embodiment of the present disclosure, the anti-reflection coating includes a first layer positioned on a substrate to be spaced apart from the substrate by a first distance and a second layer positioned on the first layer to be spaced apart from the first layer by a second distance. In this case, the first and second layers are a metamaterial forming a structural double layer and are realized as an anomalous dispersive medium that does not absorb incident light. The structural double layer may realize spatiotemporal dispersion that varies depending on an incidence angle using the nonlocality of the electromagnetic wave reaction of incident light.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: June 29, 2021
    Assignee: Korea University Research and Business Foundation
    Inventors: Q Han Park, Ku Im, Ji Hun Kang
  • Patent number: 10845232
    Abstract: Disclosed are mass flow controllers, apparatuses for manufacturing semiconductor devices, and methods of maintenance thereof. The mass flow controller may control an amount of a gas provided into a chamber. The mass flow controller may be configured to obtain an absolute volume of the gas provided into the chamber at a standard flow rate when the mass flow controller is initially used. The mass flow controller may be configured to obtain a detected flow rate of the gas provided at a measured flow rate after the mass flow controller has been used for a predetermined time. The mass flow controller may be configured to compare the detected flow rate and the standard flow rate to verify a full-scale error in the measured flow rate.
    Type: Grant
    Filed: June 20, 2018
    Date of Patent: November 24, 2020
    Inventors: Sangkil Lee, Yusin Yang, Sung Yoon Ryu, Q-Han Park, Hyun Lee
  • Publication number: 20200081161
    Abstract: The present disclosure discloses an anti-reflection coating and a method of forming the same. According to one embodiment of the present disclosure, the anti-reflection coating includes a first layer positioned on a substrate to be spaced apart from the substrate by a first distance and a second layer positioned on the first layer to be spaced apart from the first layer by a second distance. In this case, the first and second layers are a metamaterial forming a structural double layer and are realized as an anomalous dispersive medium that does not absorb incident light. The structural double layer may realize spatiotemporal dispersion that varies depending on an incidence angle using the nonlocality of the electromagnetic wave reaction of incident light.
    Type: Application
    Filed: March 8, 2019
    Publication date: March 12, 2020
    Applicant: Korea University Research and Business Foundation
    Inventors: Q Han PARK, Ku IM, Ji Hun KANG
  • Patent number: 10481188
    Abstract: Disclosed herein is a system for non-contact measurement of an optoelectronic property. The system includes a sensing element configured to amplify an electromagnetic wave having a specific frequency, a thin film disposed on the sensing element such that an optoelectronic property of the thin film is measured, and an optoelectronic property measuring server configured to extract a physical property of the thin film based on the optoelectronic property of the thin film obtained when the electromagnetic wave amplified by the sensing element passes through the thin film.
    Type: Grant
    Filed: January 18, 2018
    Date of Patent: November 19, 2019
    Assignee: Korea Institute of Science and Technology
    Inventors: Minah Seo, Sanghun Lee, Chulki Kim, Q-Han Park, Jongho Choe, Jinsoo Kim
  • Publication number: 20190170563
    Abstract: Disclosed are mass flow controllers, apparatuses for manufacturing semiconductor devices, and methods of maintenance thereof. The mass flow controller may control an amount of a gas provided into a chamber. The mass flow controller may be configured to obtain an absolute volume of the gas provided into the chamber at a standard flow rate when the mass flow controller is initially used. The mass flow controller may be configured to obtain a detected flow rate of the gas provided at a measured flow rate after the mass flow controller has been used for a predetermined time. The mass flow controller may be configured to compare the detected flow rate and the standard flow rate to verify a full-scale error in the measured flow rate.
    Type: Application
    Filed: June 20, 2018
    Publication date: June 6, 2019
    Inventors: Sangkil Lee, Yusin Yang, Sung Yoon Ryu, Q-Han Park, Hyun Lee
  • Patent number: 10288479
    Abstract: An optical device including slots and an apparatus employing the optical device are provided. An optical unit device for selectively transmitting electromagnetic waves of a wavelength range, includes a material layer including slots. A gap between the slots has a distance such that the optical unit device has a Q-factor of about 5 or more.
    Type: Grant
    Filed: April 14, 2017
    Date of Patent: May 14, 2019
    Assignees: SAMSUNG ELECTRONICS CO., LTD., KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
    Inventors: Jineun Kim, Younggeun Roh, Q Han Park, Yeonsang Park, Suyeon Lee
  • Publication number: 20190139796
    Abstract: An apparatus for manufacturing a semiconductor device is provided. The apparatus for manufacturing a semiconductor device may include a mass flow controller configured to control a flow of a process gas supplied to a process chamber, the mass flow controller configured to adjust an outflow rate of the process gas exiting the mass flow controller in response to a correction signal, the correction signal generated based on a difference between an inflow rate of the process gas flowing into the mass flow controller and a reference flow rate, a sensor configured to measure a chamber pressure inside the process chamber, an exhaust valve configured to adjust an exhaust speed of an exhaust gas exhausted from the process chamber; and a monitoring apparatus configured to detect a defect of the mass flow controller based on the correction signal, the chamber pressure, and the exhaust speed of the exhaust valve.
    Type: Application
    Filed: April 18, 2018
    Publication date: May 9, 2019
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Sang-kil LEE, Sung-yoon RYU, Hyun LEE, Yu-sin YANG, Q-han PARK
  • Publication number: 20190086458
    Abstract: Disclosed herein is a system for non-contact measurement of an optoelectronic property. The system includes a sensing element configured to amplify an electromagnetic wave having a specific frequency, a thin film disposed on the sensing element such that an optoelectronic property of the thin film is measured, and an optoelectronic property measuring server configured to extract a physical property of the thin film based on the optoelectronic property of the thin film obtained when the electromagnetic wave amplified by the sensing element passes through the thin film.
    Type: Application
    Filed: January 18, 2018
    Publication date: March 21, 2019
    Applicant: KOREA INSTITUTE OF SCIENCE AND TECHNOLOGY
    Inventors: Minah SEO, Sanghun LEE, Chulki KIM, Q-Han PARK, Jongho CHOE, Jinsoo KIM
  • Publication number: 20170370773
    Abstract: An optical device including slots and an apparatus employing the optical device are provided. An optical unit device for selectively transmitting electromagnetic waves of a wavelength range, includes a material layer including slots. A gap between the slots has a distance such that the optical unit device has a Q-factor of about 5 or more.
    Type: Application
    Filed: April 14, 2017
    Publication date: December 28, 2017
    Applicants: SAMSUNG ELECTRONICS CO., LTD., KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION
    Inventors: Jineun KIM, Younggeun ROH, Q Han PARK, Yeonsang PARK, Suyeon LEE
  • Patent number: 9499400
    Abstract: An optical device may include a substrate, a metal layer on the substrate, at least one first nano-structure in the layer, and at least one second nano-structure in the layer. The at least one first nano-structure may include a light source. The at least one first and second nano-structures may be spaced apart. A method of controlling a propagation direction of light output from an optical device that includes a metal layer on a substrate may include disposing first and second nano-structures in the layer; disposing at least one light source in the first nano-structure; and controlling the propagation direction of the light output from the at least one light source by changing at least one of a shape of the first nano-structure, a shape of the second nano-structure, a size of the first nano-structure, a size of the second nano-structure, and an interval between the first and second nano-structures.
    Type: Grant
    Filed: July 16, 2012
    Date of Patent: November 22, 2016
    Assignees: Samsung Electronics Co., Ltd., Korea Universisty Industrial & Academic Collaboration Foundation
    Inventors: Jin-eun Kim, Q-han Park, Chang-won Lee, Yeon-sang Park, Young-geun Roh, Hwan-soo Suh, Jong-ho Choe
  • Publication number: 20130070459
    Abstract: An optical device may include a substrate, a metal layer on the substrate, at least one first nano-structure in the layer, and at least one second nano-structure in the layer. The at least one first nano-structure may include a light source. The at least one first and second nano-structures may be spaced apart. A method of controlling a propagation direction of light output from an optical device that includes a metal layer on a substrate may include disposing first and second nano-structures in the layer; disposing at least one light source in the first nano-structure; and controlling the propagation direction of the light output from the at least one light source by changing at least one of a shape of the first nano-structure, a shape of the second nano-structure, a size of the first nano-structure, a size of the second nano-structure, and an interval between the first and second nano-structures.
    Type: Application
    Filed: July 16, 2012
    Publication date: March 21, 2013
    Applicants: Korea University Industrial & Academic Collaboration Foundation, Samsung Electronics Co., Ltd.
    Inventors: Jin-eun Kim, Q-han Park, Chang-won Lee, Yeon-sang Park, Young-geun Roh, Hwan-soo Suh, Jong-ho Choe
  • Publication number: 20120299047
    Abstract: Provided are a light emitting device, a light emitting device package, and a light unit. The light emitting device includes: a light emitting structure including a first conductive semiconductor layer, an active layer on the first conductive semiconductor layer, and a second conductive semiconductor layer on the active layer; a first electrode electrically connected to the first conductive semiconductor layer; and a second electrode electrically connected to the second conductive semiconductor layer. A surface of the light emitting structure has a plurality of first sides and second sides having curvatures in respectively different directions, which are alternately disposed.
    Type: Application
    Filed: January 31, 2012
    Publication date: November 29, 2012
    Inventors: Tae Jin KIM, Q-Han Park
  • Patent number: 7816699
    Abstract: Disclosed is a polarized light emitting diode (LED) capable of emitting polarized light in the front direction thereof by forming a first grating layer on a quantum well layer and forming a second grating layer on a substrate. The polarized LED includes a nitride thin film formed on a substrate, a quantum well layer formed on the nitride thin film, a first grating layer formed on the quantum well layer to allow a part of light generated from the quantum well layer to pass through the first grating layer and to reflect remaining light, and a second grating layer formed on the substrate to rotate the light reflected from the first grating layer such that the reflected light passes through the first grating layer.
    Type: Grant
    Filed: January 23, 2008
    Date of Patent: October 19, 2010
    Assignee: Korea University Industrial & Academic Collaboration Foundation
    Inventors: Q-Han Park, Won-Jun Choi, Heon-Su Jeon
  • Patent number: 7746475
    Abstract: A new high-performance, compact microgyroscope is implemented using a microlaser such as a microsphere laser or a microdisc laser that can be easily reduced in size. The microgyroscope includes a pumping unit for inputting pumping light for optical pumping, at least one microsphere or microdisc for oscillating a laser beam by performing optical pumping using light received from the pumping unit, an output coupler for receiving the oscillated laser beam from the microsphere or microdisc, and a photodetector for calculating a beat frequency due to interference between beams output from the output coupler to measure rotation. The pumping unit and the output coupler are constructed using a tapered optical fiber.
    Type: Grant
    Filed: October 6, 2008
    Date of Patent: June 29, 2010
    Assignees: Samsung Electronics Co., Ltd., Seoul National University Industry Foundation
    Inventors: Q Han Park, Heon Su Jeon
  • Publication number: 20090091763
    Abstract: A new high-performance, compact microgyroscope is implemented using a microlaser such as a microsphere laser or a microdisc laser that can be easily reduced in size. The microgyroscope includes a pumping unit for inputting pumping light for optical pumping, at least one microsphere or microdisc for oscillating a laser beam by performing optical pumping using light received from the pumping unit, an output coupler for receiving the oscillated laser beam from the microsphere or microdisc, and a photodetector for calculating a beat frequency due to interference between beams output from the output coupler to measure rotation. The pumping unit and the output coupler are constructed using a tapered optical fiber.
    Type: Application
    Filed: October 6, 2008
    Publication date: April 9, 2009
    Applicants: SAMSUNG ELECTRONICS CO., LTD., SEOUL NATIONAL UNIVERSITY INDUSTRY FOUNDATION
    Inventors: Q Han PARK, Heon Su JEON
  • Publication number: 20080290336
    Abstract: Disclosed is a polarized light emitting diode (LED) capable of emitting polarized light in the front direction thereof by forming a first grating layer on a quantum well layer and forming a second grating layer on a substrate. The polarized LED includes a nitride thin film formed on a substrate, a quantum well layer formed on the nitride thin film, a first grating layer formed on the quantum well layer to allow a part of light generated from the quantum well layer to pass through the first grating layer and to reflect remaining light, and a second grating layer formed on the substrate to rotate the light reflected from the first grating layer such that the reflected light passes through the first grating layer.
    Type: Application
    Filed: January 23, 2008
    Publication date: November 27, 2008
    Inventors: Q-Han PARK, Won-Jun Choi, Heon-Su Jeon