Patents by Inventor Qiang Jimmy Zhao

Qiang Jimmy Zhao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System, method, and computer program product for automatically determining a parameter causing an abnormal semiconductor metrology measurement
    Patent number: 10393647
    Abstract: A system, method, and computer program product are provided for automatically determining a parameter causing an abnormal semiconductor metrology measurement. In use, an abnormal semiconductor metrology measurement measured from a fabricated semiconductor component is received. At least one parameter of the fabricated semiconductor component causing the abnormal semiconductor metrology measurement is then automatically determined by one or more hardware processors.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: August 27, 2019
    Assignee: KLA-TENCOR CORPORATION
    Inventors: Qiang Jimmy Zhao, Liequan Lee, Jonathan Ian Iloreta, Hong Qiu, Leonid Poslavsky