Abstract: The present application form a via and a trench longitudinally communicating with the via; forming a TiN barrier layer on an inner surface of the trench and on an inner surface of the via; forming a Co seed layer on a surface of the TiN barrier layer; fully filling the via with Co by means of electrochemical deposition; forming a TiN hard mask layer over the Co on the bottom of the trench; removing the Co seed layer on sidewalls of the trench; removing the TiN hard mask layer on the bottom of the trench; covering the sidewalls and bottom of the trench with a TaN/Ta barrier layer; covering the TaN/Ta barrier layer with a liner layer; growing a Cu seed layer over the liner layer in the trench; and filling the trench with Cu by means of electrochemical deposition, and performing top planarization.

Abstract: A microfluidic chip for culturing and real-time monitoring of multicellular tissues and use method thereof. The chip comprises a glass substrate layer, and a PDMS microchannel layer located on the glass substrate layer, wherein the glass substrate layer comprises a glass substrate, and a plurality of microelectrodes thereon; the PDMS microchannel comprises a plurality of independent microfluidic channels; the microelectrodes on the glass substrate are in one-to-one correspondence with the microfluidic channels in the PDMS microchannel layer; and the microelectrodes are electrically connected to an external circuit. The use method comprises: cell capture, cell or tissue culture, electrical impedance spectroscopy detection, and tissue release.

Abstract: A microfluidic chip for culturing and real-time monitoring of multicellular tissues and use method thereof. The chip comprises a glass substrate layer, and a PDMS microchannel layer located on the glass substrate layer, wherein the glass substrate layer comprises a glass substrate, and a plurality of microelectrodes thereon; the PDMS microchannel comprises a plurality of independent microfluidic channels; the microelectrodes on the glass substrate are in one-to-one correspondence with the microfluidic channels in the PDMS microchannel layer; and the microelectrodes are electrically connected to an external circuit. The use method comprises: cell capture, cell or tissue culture, electrical impedance spectroscopy detection, and tissue release.