Patents by Inventor Qiaoyu ZENG

Qiaoyu ZENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230402525
    Abstract: Embodiments of the present application relate to the technical field of semiconductors, and provide a manufacturing method for an N-polar GaN transistor structure and a semiconductor structure. A Ga-polar epitaxial functional layer is formed by depositing, a supporting substrate is formed on the epitaxial functional layer by bonding, after the epitaxial structure is inverted, a structural substrate and a buffer layer are removed, and a source, a drain, and a gate are manufactured on the side of the exposed epitaxial functional layer away from the supporting substrate, to form an N-polar GaN transistor structure.
    Type: Application
    Filed: December 27, 2021
    Publication date: December 14, 2023
    Applicant: Institute of Semiconductors, Guangdong Academy of Sciences
    Inventors: Chengguo LI, Qiaoyu ZENG, Xuebing YIN, Xiaoming GE, Zhitao CHEN