Patents by Inventor Qicheng Hu

Qicheng Hu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF FABRICATING PELLICLE STRUCTURE
    Publication number: 20230273515
    Abstract: A method of fabricating a pellicle structure includes forming a metal layer on a temporary substrate, forming a membrane on the metal layer, exposing a bottom surface of the metal layer by separating the temporary substrate from the metal layer, and exposing a bottom surface of the membrane by etching the exposed bottom surface of the metal layer.
    Type: Application
    Filed: September 20, 2022
    Publication date: August 31, 2023
    Applicants: SAMSUNG ELECTRONICS CO., LTD., Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
    Inventors: MUN JA KIM, JI BEOM YOO, KI BONG NAM, JIN HO YEO, CHANGYOUNG JEONG, QICHENG HU
  • METHODS OF MANUFACTURING A PELLICLE HAVING GRAPHITE LAYER
    Publication number: 20220350240
    Abstract: A method for manufacturing a pellicle according to the technical idea of the present invention includes preparing a support substrate, forming a catalyst layer including nickel (Ni) in which one selected from a (110) plane and a (100) plane is a dominant crystal plane, on the support substrate, and performing a chemical vapor deposition process on the catalyst layer at about 1050° C. or less to form a membrane having a graphite layer.
    Type: Application
    Filed: April 3, 2022
    Publication date: November 3, 2022
    Applicants: Samsung Electronics Co., Ltd., RESEARCH AND BUSINESS FOUNDATION SUNGKYUNKWAN UNIVERSITY
    Inventors: Mun Ja Kim, Ji-Beom Yoo, Qicheng Hu, Changyoung Jeong, Ki-Bong Nam, Jin-Ho Yeo