Patents by Inventor Qilin HAO

Qilin HAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etchant composition
    Patent number: 11136504
    Abstract: An etchant composition for wet etching a titanium-containing film. The etchant composition includes hydrofluoric acid as a primary oxidant, a co-oxidant that forms a dense oxide film on a surface of a titanium film during an etching process, an alkali metal salt that inhibits aggregation and adsorption of titanium ions during the etching process, and a solvent.
    Type: Grant
    Filed: April 23, 2019
    Date of Patent: October 5, 2021
    Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
    Inventor: Qilin Hao
  • ETCHANT COMPOSITION
    Publication number: 20200216759
    Abstract: An etchant composition for wet etching a titanium-containing film. The etchant composition includes hydrofluoric acid as a primary oxidant, a co-oxidant that forms a dense oxide film on a surface of a titanium film during an etching process, an alkali metal salt that inhibits aggregation and adsorption of titanium ions during the etching process, and a solvent.
    Type: Application
    Filed: April 23, 2018
    Publication date: July 9, 2020
    Applicant: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
    Inventor: Qilin HAO