Patents by Inventor Qing S. Paduano

Qing S. Paduano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for measuring the thickness and composition of thin semiconductor films deposited on semiconductor wafers
    Patent number: 6048742
    Abstract: The invention works by taking optical reflectance measurements on the deposited layers at different wavelengths and fitting the measured results to extract the thicknesses and compositions. The process of the present invention simultaneously measures the thicknesses of elemental and binary semiconductors' layers and the thicknesses and composition of ternary layers. Highly precise thickness and composition estimates and wafer maps of the growth rates and composition are provided by (1) measuring in a wavelength range at which the index of refractions are rapidly varying and (2) growing a special high reflectance test structure consisting of alternating layers of the materials to be measured.
    Type: Grant
    Filed: February 26, 1998
    Date of Patent: April 11, 2000
    Assignee: The United States of America as represented by the Secretary of the Air Force
    Inventors: David W. Weyburne, Qing S. Paduano