Abstract: Disclosed is a wind speed sensor based on a flexible inductor and a silicon-based inductor, which relates to a MEMS device and belongs to the field of measurement and testing technologies. The wind speed sensor is a double-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor and a metal layer of the silicon-based inductor face to each other and form, between them, an air cavity sufficient for mutual induction of electromotance. A contact block constituting a measuring port is deposited in the metal layer of the silicon-based inductor. The present invention has a light structure, and implements wind speed detection based on the Bernoulli effect and the coil mutual inductance effect.

Abstract: Disclosed a passive wireless sensor for detecting discrete droplets and bubbles. A first inductor channel and a second inductor channel are disposed opposite each other to form a capacitor channel, the first inductor channel is connected to the second inductor channel to form a resonant circuit. When a detection object passes through the detection channel, the permittivity between the first inductor channel and the second inductor channel changes and consequently a capacitance value of the capacitor channel changes, thus resulting in a change in resonant frequency of the resonant circuit. A readout device is used to read the resonant frequency of the resonant circuit and perform detection according to the resonant frequency to obtain information of a corresponding detection object.

Abstract: Disclosed a passive wireless sensor for detecting discrete droplets and bubbles. A first inductor channel and a second inductor channel are disposed opposite each other to form a capacitor channel, the first inductor channel is connected to the second inductor channel to form a resonant circuit. When a detection object passes through the detection channel, the permittivity between the first inductor channel and the second inductor channel changes and consequently a capacitance value of the capacitor channel changes, thus resulting in a change in resonant frequency of the resonant circuit. A readout device is used to read the resonant frequency of the resonant circuit and perform detection according to the resonant frequency to obtain information of a corresponding detection object.

Abstract: Disclosed is a passive wireless device for microfluidic detection of multi-level droplets. A primary inductor channel and a secondary inductor channel each comprise two layers of inductance coils, and the inductance coils of the primary inductor channel and the secondary inductor channel are alternately arranged in each layer. A double-resonance circuit is formed after a liquid conductive material is injected. A first part of a detection channel is disposed between a primary capacitor channel, and a second part of a detection channel is disposed between a secondary capacitor channel. A reading device is used to read a resonant frequency of the double-resonance circuit, and perform detection according to the resonant frequency to obtain information of a corresponding first droplet group and/or second droplet group.

Abstract: Disclosed is a passive wireless device for microfluidic detection of multi-level droplets. A primary inductor channel and a secondary inductor channel each comprise two layers of inductance coils, and the inductance coils of the primary inductor channel and the secondary inductor channel are alternately arranged in each layer. A double-resonance circuit is formed after a liquid conductive material is injected. A first part of a detection channel is disposed between a primary capacitor channel, and a second part of a detection channel is disposed between a secondary capacitor channel. A reading device is used to read a resonant frequency of the double-resonance circuit, and perform detection according to the resonant frequency to obtain information of a corresponding first droplet group and/or second droplet group.

Abstract: A method for measuring mechanical parameters of a multilayer composite thin film structure and belongs to the technical field of online tests of micro-electro-mechanical system (MEMS for short) material parameters. Equivalent Young modulus and equivalent residual stress of each layer of the multilayer composite thin film structure can be obtained in one step by means of solving an equation set on the basis of a relationship between first-order resonance frequency of multilayer composite fixed-fixed beams and multilayer composite cantilever beams and parameters such as material characteristics and structure size, the online test of multilayer thin film materials can be realized, the test structure and calculating method are simple, and the accuracy is higher. The present invention further discloses a device for measuring mechanical parameters of the multilayer composite thin film structure.

Abstract: Disclosed is a wind speed sensor based on a flexible inductor and a silicon-based inductor, which relates to a MEMS device and belongs to the field of measurement and testing technologies. The wind speed sensor is a double-layer inductor structure composed of a flexible inductor and a silicon-based inductor. A metal layer of the flexible inductor and a metal layer of the silicon-based inductor face to each other and form, between them, an air cavity sufficient for mutual induction of electromotance. A contact block constituting a measuring port is deposited in the metal layer of the silicon-based inductor. The present invention has a light structure, and implements wind speed detection based on the Bernoulli effect and the coil mutual inductance effect.

Abstract: A method for measuring mechanical parameters of a multilayer composite thin film structure and belongs to the technical field of online tests of micro-electro-mechanical system (MEMS for short) material parameters. Equivalent Young modulus and equivalent residual stress of each layer of the multilayer composite thin film structure can be obtained in one step by means of solving an equation set on the basis of a relationship between first-order resonance frequency of multilayer composite fixed-fixed beams and multilayer composite cantilever beams and parameters such as material characteristics and structure size, the online test of multilayer thin film materials can be realized, the test structure and calculating method are simple, and the accuracy is higher. The present invention further discloses a device for measuring mechanical parameters of the multilayer composite thin film structure.