Abstract: Disclosed herein are electronic sensor systems and methods of their operation. The electronic sensor systems contain a micro-electromechanical system (MEMS) for measuring a physical parameter such as rotation, pressure, acceleration, or another physical parameter. The electronic sensor systems also contain an integrated circuit linked with the MEMS. The integrated circuit contains a MEMS sensing circuit that receives outputs from the MEMS through conductors, such as wire bonds or ball joints, at least partially encapsulated in a dielectric. The dielectric may experience environmentally-induced changes to its dielectric constant that may affect a capacitance between a pair of the conductors, which can affect a measurement provided by the MEMS. The integrated circuit contains a compensation circuit that measures a capacitance between a pair of the conductors and provides an adjustment to a measurement provided by the MEMS.

Abstract: Embodiments are disclosed for active cancellation of noise in motion sensor signals. In some embodiments, a method comprises: obtaining a motion sensor signal from a motion sensor; obtaining a reference signal indicative of parasitic vibration from a vibration source mechanically coupled to the motion sensor; generating, using an adaptive noise canceller, an estimate of the parasitic vibration; and using the estimated parasitic vibration to cancel the parasitic vibration from the motion sensor signal.

Abstract: According to some aspects of the subject technology, an apparatus includes an accelerometer including one or more sense electrodes to sense an input acceleration, and an unstick device to free the accelerometer from a stuck state due to a saturating acceleration input. The unstick device includes at least one unstick electrode and a control circuitry to cause the unstick electrode to generate vibrational energy to free the accelerometer.

Abstract: According to some aspects of the subject technology, an apparatus includes an accelerometer including one or more sense electrodes to sense an input acceleration, and an unstick device to free the accelerometer from a stuck state due to a saturating acceleration input. The unstick device includes at least one unstick electrode and a control circuitry to cause the unstick electrode to generate vibrational energy to free the accelerometer.