Patents by Inventor Qing Jiu CHEN

Qing Jiu CHEN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for an advanced charged controller for wafer inspection
    Patent number: 11482399
    Abstract: A system and method for advanced charge control of a light beam is provided. The system comprising a laser source comprising a laser diode for emitting a beam and a beam homogenizer to homogenize the emitted beam. The system and methods further comprise a beam shaper configured to shape the emitted beam using an anamorphic prism group and a driver configured to direct the shaped beam to a specified position on a wafer, wherein the laser source, the beam shaper, and the driver are coaxially aligned.
    Type: Grant
    Filed: September 25, 2018
    Date of Patent: October 25, 2022
    Assignee: ASML Netherlands B.V.
    Inventors: Jian Zhang, Qing Jiu Chen, Yixiang Wang
  • METHOD AND APPARATUS FOR AN ADVANCED CHARGED CONTROLLER FOR WAFER INSPECTION
    Publication number: 20200273662
    Abstract: A system and method for advanced charge control of a light beam is provided. The system comprising a laser source comprising a laser diode for emitting a beam and a beam homogenizer to homogenize the emitted beam. The system and methods further comprise a beam shaper configured to shape the emitted beam using an anamorphic prism group and a driver configured to direct the shaped beam to a specified position on a wafer, wherein the laser source, the beam shaper, and the driver are coaxially aligned.
    Type: Application
    Filed: September 25, 2018
    Publication date: August 27, 2020
    Inventors: Jian ZHANG, Qing Jiu CHEN, Yixiang WANG