Abstract: Techniques related to semiconductor fabrication are generally described herein. An example fabrication method may include coupling, by a lithographic equipment, a surface of a planar waveguide structure with a first surface of a photolithographic mask. Some example methods may also include directing, by the lithographic equipment, a lithography light beam into the planar waveguide structure, causing a surface plasmon being emitted from the surface of the planar waveguide structure when the lithography light beam is reflected by internal surfaces of the planar waveguide structure, effectuating an attenuated total reflection. Some example methods may further include directing, by the lithographic equipment, an evanescent wave caused by the surface plasmon through the photolithographic mask, wherein the evanescent wave has a sub-diffraction characteristic and is used as a photolithographic light source.

Abstract: Techniques described herein generally relate to the fabrication of ultra-capacitor. In one or more embodiments of the present disclosure, methods for fabricating an ultra-capacitor are described that may include preparing a substrate surface of a silicon wafer. The methods may further include etching one or more nano-structures on the substrate surface of the silicon wafer with a galvanic displacement process, and constructing electrodes for the ultra-capacitor from the silicon wafer with the one or more nano-structures.

Abstract: Techniques related to semiconductor fabrication are generally described herein. An example fabrication method may include coupling, by a lithographic equipment, a surface of a planar waveguide structure with a first surface of a photolithographic mask. Some example methods may also include directing, by the lithographic equipment, a lithography light beam into the planar waveguide structure, causing a surface plasmon being emitted from the surface of the planar waveguide structure when the lithography light beam is reflected by internal surfaces of the planar waveguide structure, effectuating an attenuated total reflection. Some example methods may further include directing, by the lithographic equipment, an evanescent wave caused by the surface plasmon through the photolithographic mask, wherein the evanescent wave has a sub-diffraction characteristic and is used as a photolithographic light source.

Abstract: Techniques related to a carbon fiber comprising a magnetic material, methods for making, using and recycling the carbon fiber, are generally described. One example method of making the carbon fiber may include placing the carbon fiber in a solution to form a suspension. The solute includes a metal element of the magnetic material. The example method may further include introducing a gas to contact with the suspension at a first pressure and a first temperature to form a supercritical fluid from the gas and raising the temperature of the carbon fiber to a second temperature.

Abstract: Techniques described herein generally relate to the fabrication of ultra-capacitor. In one or more embodiments of the present disclosure, methods for fabricating an ultra-capacitor are described that may include preparing a substrate surface of a silicon wafer. The methods may further include etching one or more nano-structures on the substrate surface of the silicon wafer with a galvanic displacement process, and constructing electrodes for the ultra-capacitor from the silicon wafer with the one or more nano-structures.