Patents by Inventor Qingxuan WANG

Qingxuan WANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Loading apparatus and physical vapor deposition apparatus
    Patent number: 11315768
    Abstract: The present disclosure provides a loading apparatus and a physical vapor deposition (PVD) apparatus. The loading apparatus includes a pedestal configured to support a workpiece; and a first support member placed on the pedestal and configured to push up a cover ring when the pedestal is at an operation position to prevent an overlapping portion of a cover ring and the workpiece from contacting each other. In the loading apparatus and the PVD apparatus, the first support member supports the cover ring, such that the cover ring does not contact the workpiece, thereby reducing stress forces on the workpiece by external components.
    Type: Grant
    Filed: June 15, 2018
    Date of Patent: April 26, 2022
    Assignee: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    Inventors: Xuewei Wu, Tong Wang, Boyu Dong, Jun Zhang, Bingliang Guo, Jun Wang, Henan Zhang, Baogang Xu, Huaichao Ma, Shaohui Liu, Kangning Zhao, Yujie Geng, Qingxuan Wang, Yaxin Cui
  • LOADING APPARATUS AND PHYSICAL VAPOR DEPOSITION APPARATUS
    Publication number: 20200144035
    Abstract: The present disclosure provides a loading apparatus and a physical vapor deposition (PVD) apparatus. The loading apparatus includes a pedestal configured to support a workpiece; and a first support member placed on the pedestal and configured to push up a cover ring when the pedestal is at an operation position to prevent an overlapping portion of a cover ring and the workpiece from contacting each other. In the loading apparatus and the PVD apparatus, the first support member supports the cover ring, such that the cover ring does not contact the workpiece, thereby reducing stress forces on the workpiece by external components.
    Type: Application
    Filed: June 15, 2018
    Publication date: May 7, 2020
    Inventors: Xuewei WU, Tong WANG, Boyu DONG, Jun ZHANG, Bingliang GUO, Jun WANG, Henan ZHANG, Baogang XU, Huaichao MA, Shaohui LIU, Kangning ZHAO, Yujie GENG, Qingxuan WANG, Yaxin CUI