Patents by Inventor Qingyun Yang

Qingyun Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11914092
    Abstract: The present disclosure provides an inductive magnetic sensor, which includes a signal pre-amplifying measurement circuit, a feedback loop, a magnetic core and coil group, a low-noise autozero processing circuit, and an output protection module. The magnetic core and coil group is electrically connected between the signal pre-amplifying measurement circuit and the feedback loop, the signal pre-amplifying measurement circuit comprises the low-noise autozero processing circuit, and the feedback loop and the low-noise autozero processing circuit are electrically connected to the output protection module respectively. By introducing the resonant notch filter, it may extend the passband to the low frequency, and extend the low-frequency characteristic of the magnetic sensor, to obtain a better low-frequency magnetic sensor. The present disclosure further provides an electromagnetic prospecting equipment.
    Type: Grant
    Filed: December 9, 2020
    Date of Patent: February 27, 2024
    Assignee: INSTITUTE OF GEOLOGY AND GEOPHYSICS, THE CHINESE ACADEMY OF SCIENCES
    Inventors: Qingyun Di, Qihui Zhen, Yuliang Wang, Zhiyao Liu, Quanmin Yang
  • Patent number: 11844290
    Abstract: Embodiments of process flows and methods are provided for forming a resistive switching random access memory (ReRAM). More specifically, process flows and methods are provided for reducing the forming voltage needed to form a conductive path in the ReRAM cells. A wide variety of plasma doping processes are used to introduce a plurality of different dopants into a metal-oxide dielectric film. By utilizing at least two different dopants, the plasma doping processes described herein reduce the forming voltage of the subsequently formed ReRAM cell compared to conventional processes that use only one dopant. In some embodiments, the forming voltage may be further reduced by applying a bias power during the plasma doping process, wherein the bias power is preselected to increase the number of ions introduced into the metal-oxide dielectric film during the plasma doping process.
    Type: Grant
    Filed: June 3, 2021
    Date of Patent: December 12, 2023
    Assignees: Tokyo Electron Limited, International Business Machines Corporation
    Inventors: Devi Koty, Qingyun Yang, Hongwen Yan, Hiroyuki Miyazoe, Takashi Ando, Marinus Johannes Petrus Hopstaken
  • Publication number: 20230329127
    Abstract: A resistive memory device with an embedded shoulder pulled sidewall spacer and method of forming. The method includes providing a patterned film stack containing a lower electrode layer, a dielectric filament layer on the lower electrode layer, and an upper electrode layer on the dielectric filament layer, depositing a conformal cap layer on the patterned film stack, dry etching the conformal cap layer to form a sidewall spacer on sidewalls of the patterned film stack, where a top of the sidewall spacer is recessed to below a top of the upper electrode layer by the dry etching. The method further includes encapsulating the patterned film stack in an isolation layer, and etching the isolation layer to expose the upper electrode layer without exposing the sidewall spacer.
    Type: Application
    Filed: March 23, 2023
    Publication date: October 12, 2023
    Inventors: Devi Koty, Qingyun Yang, Hiroyuki Miyazoe, Takashi Ando
  • Publication number: 20230002343
    Abstract: The invention relates to the field of pharmaceutical chemistry, and it particularly relates to a left-handed bicyclic morpholine and a pharmaceutically acceptable salt thereof, a preparation method therefor, a pharmaceutical composition and use thereof in the preparation of medicaments for preventing and/or treating liver diseases and the like.
    Type: Application
    Filed: September 15, 2020
    Publication date: January 5, 2023
    Applicants: Institute of Materia Medica, Chinese Academy of Medical Sciences, Changchun Intellicrown Pharmaceutical Co., Ltd.
    Inventors: Song WU, Hua SUN, Jinlan ZHANG, Wenxuan ZHANG, Zhe WANG, Qingyun YANG, Lin JIANG, Zihan CHEN, Jing SHEN, Jie ZHANG, Chi ZHANG, Zunsheng HAN, Tong QIN, Yuanyuan ZHANG
  • Publication number: 20220393107
    Abstract: Embodiments of process flows and methods are provided for forming a resistive switching random access memory (ReRAM). More specifically, process flows and methods are provided for reducing the forming voltage needed to form a conductive path in the ReRAM cells. A wide variety of plasma doping processes are used to introduce a plurality of different dopants into a metal-oxide dielectric film. By utilizing at least two different dopants, the plasma doping processes described herein reduce the forming voltage of the subsequently formed ReRAM cell compared to conventional processes that use only one dopant. In some embodiments, the forming voltage may be further reduced by applying a bias power during the plasma doping process, wherein the bias power is preselected to increase the number of ions introduced into the metal-oxide dielectric film during the plasma doping process.
    Type: Application
    Filed: June 3, 2021
    Publication date: December 8, 2022
    Inventors: Devi KOTY, Qingyun YANG, Hongwen YAN, Hiroyuki MIYAZOE, Takashi ANDO, Marinus Johannes Petrus HOPSTAKEN
  • Patent number: 11258012
    Abstract: A resistive random access memory (RERAM) apparatus and method for forming the apparatus are provided. Oxygen content control in the RERAM is provided. To provide oxygen content control, a via to an electrode of the RERAM is formed utilizing an oxygen-free plasma etch step. In one embodiment, the dielectric within which the via is formed is silicon nitride (SiN). In exemplary embodiments, the plasma chemistry is a hydrofluorocarbon (CxHyFz)-based plasma chemistry or a fluorocarbon (CxFy)-based plasma chemistry. In one embodiment, the resistive layer of the RERAM is a metal oxide. In another embodiment, the oxygen concentrations in the electrode of the RERAM under the via and outside the via are the same after formation of the via.
    Type: Grant
    Filed: April 16, 2019
    Date of Patent: February 22, 2022
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Devi Koty, Qingyun Yang, Hiroyuki Miyazoe, Takashi Ando, Eduard Cartier, Vijay Narayanan, Sebastian Ulrich Englemann
  • Publication number: 20210118693
    Abstract: A method of plasma processing that includes maintaining a plasma processing chamber between 10° C. to 200° C., flowing oxygen and nitrogen into the plasma processing chamber, where a ratio of a flow rate of the nitrogen to a flow rate of oxygen is between about 1:5 and about 1:1, and etching a ruthenium/osmium layer by sustaining a plasma in the plasma processing chamber.
    Type: Application
    Filed: October 21, 2019
    Publication date: April 22, 2021
    Inventors: Nicholas Joy, Devi Koty, Qingyun Yang, Nathan P. Marchack, Sebastian Ulrich Engelmann
  • Publication number: 20200203607
    Abstract: A resistive random access memory (RERAM) apparatus and method for forming the apparatus are provided. Oxygen content control in the RERAM is provided. To provide oxygen content control, a via to an electrode of the RERAM is formed utilizing an oxygen-free plasma etch step. In one embodiment, the dielectric within which the via is formed is silicon nitride (SiN). In exemplary embodiments, the plasma chemistry is a hydrofluorocarbon (CxHyFz)-based plasma chemistry or a fluorocarbon (CxFy)-based plasma chemistry. In one embodiment, the resistive layer of the RERAM is a metal oxide. In another embodiment, the oxygen concentrations in the electrode of the RERAM under the via and outside the via are the same after formation of the via.
    Type: Application
    Filed: April 16, 2019
    Publication date: June 25, 2020
    Inventors: Devi Koty, Qingyun Yang, Hiroyuki Miyazoe, Takashi Ando, Eduard Cartier, Vijay Narayanan, Sebastian Ulrich Englemann
  • Patent number: 10651372
    Abstract: A process and device is disclosed for etching a magnetroresistive random access memory device which includes at least one magnetic tunnel junction stack structure which includes an insulating layer disposed between first and second magnetic layers. The process includes the step of contacting a substrate with a chlorine containing plasma at a temperature no greater than 30 degrees Centigrade under conditions effective to convert at least a portion of the first and second magnetic layers and the insulating layer into metal chlorides. Next, the resulting product of the contacting step is treated with an organic solvent under conditions effective to remove the metal chlorides. The treatment can include rinsing away the metal chlorides either by dissolving the metal chlorides, or by reacting the metal chlorides with a reactive organic solvent, or both.
    Type: Grant
    Filed: June 11, 2018
    Date of Patent: May 12, 2020
    Assignee: Tokyo Electron Limited
    Inventor: Qingyun Yang
  • Publication number: 20180358548
    Abstract: A process and device is disclosed for etching a magnetroresistive random access memory device which includes at least one magnetic tunnel junction stack structure which includes an insulating layer disposed between first and second magnetic layers. The process includes the step of contacting a substrate with a chlorine containing plasma at a temperature no greater than 30 degrees Centigrade under conditions effective to convert at least a portion of the first and second magnetic layers and the insulating layer into metal chlorides. Next, the resulting product of the contacting step is treated with an organic solvent under conditions effective to remove the metal chlorides. The treatment can include rinsing away the metal chlorides either by dissolving the metal chlorides, or by reacting the metal chlorides with a reactive organic solvent, or both.
    Type: Application
    Filed: June 11, 2018
    Publication date: December 13, 2018
    Inventor: Qingyun Yang
  • Patent number: 9949946
    Abstract: Inclusion complexes of pinocembrin with cyclodextrin or its derivatives and their preparation are provided. The inclusion complexes can be used to make drugs.
    Type: Grant
    Filed: November 11, 2008
    Date of Patent: April 24, 2018
    Assignee: CSPC ZHONGQI PHARMACEUTICAL TECHNOLOGY (SHIJIAZHUANG) CO., LTD.
    Inventors: Song Wu, Guanhua Du, Yan Qi, Mei Gao, Qingyun Yang, Hongmei Guang, Wei Li, Yuehua Wang, Yuanfeng Tong
  • Patent number: 9105741
    Abstract: A method of forming a semiconductor structure may include forming at least one fin and forming, over a first portion of the at least one fin structure, a gate. Gate spacers may be formed on the sidewalls of the gate, whereby the forming of the spacers creates recessed regions adjacent the sidewalls of the at least one fin. A first epitaxial region is formed that covers both one of the recessed regions and a second portion of the at least one fin, such that the second portion extends outwardly from one of the gate spacers. A first epitaxial layer is formed within the one of the recessed regions by etching the first epitaxial region and the second portion of the at least one fin. A second epitaxial region is formed at a location adjacent one of the spacers and over the first epitaxial layer within one of the recessed regions.
    Type: Grant
    Filed: September 13, 2012
    Date of Patent: August 11, 2015
    Assignee: International Business Machines Corporation
    Inventors: Kevin K. Chan, Jinghong Li, Dae-Gyu Park, Xinhui Wang, Yun-Yu Wang, Qingyun Yang
  • Publication number: 20140070316
    Abstract: A method of forming a semiconductor structure may include forming at least one fin and forming, over a first portion of the at least one fin structure, a gate. Gate spacers may be formed on the sidewalls of the gate, whereby the forming of the spacers creates recessed regions adjacent the sidewalls of the at least one fin. A first epitaxial region is formed that covers both one of the recessed regions and a second portion of the at least one fin, such that the second portion extends outwardly from one of the gate spacers. A first epitaxial layer is formed within the one of the recessed regions by etching the first epitaxial region and the second portion of the at least one fin. A second epitaxial region is formed at a location adjacent one of the spacers and over the first epitaxial layer within one of the recessed regions.
    Type: Application
    Filed: September 13, 2012
    Publication date: March 13, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Kevin K. Chan, Jinghong Li, Dae-Gyu Park, Xinhui Wang, Yun-Yu Wang, Qingyun Yang
  • Patent number: 8481389
    Abstract: A semiconductor structure, and method of forming a semiconductor structure, that includes a gate structure on a semiconductor substrate, in which the gate structure includes a gate conductor and a high-k gate dielectric layer. The high-k gate dielectric layer is in contact with the base of the gate conductor and is present on the sidewalls of the gate conductor for a dimension that is less than ¼ the gate structure's height. The semiconductor structure also includes source regions and drain regions present in the semiconductor substrate on opposing sides of the gate structure.
    Type: Grant
    Filed: April 5, 2011
    Date of Patent: July 9, 2013
    Assignee: International Business Machines Corporation
    Inventors: Ying Zhang, Qingyun Yang, Hongwen Yan
  • Patent number: 8445948
    Abstract: Methodologies and gate etching processes are presented to enable the fabrication of gate conductors of semiconductor devices, such as NFETs and/or PFETs, which are equipped with nano-channels. In one embodiment, a sacrificial spacer of equivalent thickness to the diameter of the gate nano-channel is employed and is deposited after patterning the gate conductor down to the gate dielectric. The residue gate material that is beneath the nano-channel is removed utilizing a medium to high density, bias-free, fluorine-containing or fluorine-and chlorine-containing isotropic etch process without compromising the integrity of the gate. In another embodiment, an encapsulation/passivation layer is utilized. In yet further embodiment, no sacrificial spacer or encapsulation/passivation layer is used and gate etching is performed in an oxygen and nitrogen-free ambient.
    Type: Grant
    Filed: September 20, 2010
    Date of Patent: May 21, 2013
    Assignee: International Business Machines Corporation
    Inventors: Nicholas C. M. Fuller, Sarunya Bangsaruntip, Guy Cohen, Sebastian U. Engelmann, Lidija Sekaric, Qingyun Yang, Ying Zhang
  • Patent number: 8399691
    Abstract: The present invention relates to a method for resolution of a mixture of pinocembrin optical isomers, in particular a pinocembrin racemate, using a chiral primary amine or a chiral sulfinamide. The present invention also relates to a (R)-(+)-pinocembrin obtained by the method.
    Type: Grant
    Filed: November 7, 2008
    Date of Patent: March 19, 2013
    Assignees: CSPC Zhongqi Pharmaceutical Technology (Shijiazhuang) Co. Ltd., Institute of Materia Medica, Chinese Academy of Medical Sciences
    Inventors: Song Wu, Guanhua Du, Yue Yuan, Qingyun Yang, Mei Gao, Yan Qi, Yuanfeng Tong, Yuehua Wang
  • Publication number: 20120256278
    Abstract: A semiconductor structure, and method of forming a semiconductor structure, that includes a gate structure on a semiconductor substrate, in which the gate structure includes a gate conductor and a high-k gate dielectric layer. The high-k gate dielectric layer is in contact with the base of the gate conductor and is present on the sidewalls of the gate conductor for a dimension that is less than ¼ the gate structure's height. The semiconductor structure also includes source regions and drain regions present in the semiconductor substrate on opposing sides of the gate structure.
    Type: Application
    Filed: April 5, 2011
    Publication date: October 11, 2012
    Applicant: International Business Machines Corporation
    Inventors: Ying Zhang, Qingyun Yang, Hongwen Yan
  • Publication number: 20110218173
    Abstract: Inclusion complexes of pinocembrin with cyclodextrin or its derivatives and their preparation are provided. The inclusion complexes can be used to make drugs.
    Type: Application
    Filed: November 11, 2008
    Publication date: September 8, 2011
    Inventors: Song Wu, Guanhua Du, Yan Qi, Mei Gao, Qingyun Yang, Hongmei Guang, Wei Li, Yuehua Wang, Yuanfeng Tong
  • Publication number: 20110006367
    Abstract: Methodologies and gate etching processes are presented to enable the fabrication of gate conductors of semiconductor devices, such as NFETs and/or PFETs, which are equipped with nano-channels. In one embodiment, a sacrificial spacer of equivalent thickness to the diameter of the gate nano-channel is employed and is deposited after patterning the gate conductor down to the gate dielectric. The residue gate material that is beneath the nano-channel is removed utilizing a medium to high density, bias-free, fluorine-containing or fluorine- and chlorine-containing isotropic etch process without compromising the integrity of the gate. In another embodiment, an encapsulation/passivation layer is utilized. In yet further embodiment, no sacrificial spacer or encapsulation/passivation layer is used and gate etching is performed in an oxygen and nitrogen-free ambient.
    Type: Application
    Filed: September 20, 2010
    Publication date: January 13, 2011
    Applicant: International Business Machines Corporation
    Inventors: Nicholas C.M. Fuller, Sarunya Bangsaruntip, Guy Cohen, Sebastian U. Engelmann, Lidija Sekaric, Qingyun Yang, Ying Zhang
  • Patent number: 7816275
    Abstract: Methodologies and gate etching processes are presented to enable the fabrication of gate conductors of semiconductor devices, such as NFETs and/or PFETs, which are equipped with nano-channels. In one embodiment, a sacrificial spacer of equivalent thickness to the diameter of the gate nano-channel is employed and is deposited after patterning the gate conductor down to the gate dielectric. The residue gate material that is beneath the nano-channel is removed utilizing a medium to high density, bias-free, fluorine-containing or fluorine- and chlorine-containing isotropic etch process without compromising the integrity of the gate. In another embodiment, an encapsulation/passivation layer is utilized. In yet further embodiment, no sacrificial spacer or encapsulation/passivation layer is used and gate etching is performed in an oxygen and nitrogen-free ambient.
    Type: Grant
    Filed: April 3, 2009
    Date of Patent: October 19, 2010
    Assignee: International Business Machines Corporation
    Inventors: Nicholas C. M. Fuller, Sarunya Bangsaruntip, Guy Cohen, Sebastian U. Engelmann, Lidija Sekaric, Qingyun Yang, Ying Zhang