Abstract: A method includes receiving, by a control module of a wafer transport system, an indication of wafer transporting; calculating, by the control module, a route for transporting a first wafer carrier according to the indication; moving, by a control unit of a wafer transport device of the wafer transport system, the wafer transport device to a first stocker storing the first wafer carrier along the route; performing, by the control unit, a safety monitoring process during a movement of the wafer transport device; stopping, by the control unit, the wafer transport device in front of the first stocker; and identifying, by an identification device of the wafer transport device, the first wafer carrier loaded on a rack of the wafer transport device.