Patents by Inventor Qinli Ma

Qinli Ma has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240081155
    Abstract: A semiconductor memory device includes a bottom electrode, a magnetic tunnel junction (MTJ) structure disposed over the bottom electrode, a seed layer disposed between the MTJ structure and the bottom electrode, and a non-magnetic amorphous insertion layer disposed between the seed layer and the bottom electrode.
    Type: Application
    Filed: September 7, 2022
    Publication date: March 7, 2024
    Applicant: HeFeChip Corporation Limited
    Inventors: Young-suk Choi, Qinli Ma, Wei-Chuan Chen
  • Patent number: 11763972
    Abstract: A magnetic tunnel junction (MTJ) element including a free layer, a reference layer; and a tunnel barrier layer between the free layer and the reference layer. The reference layer includes a first pinned layer, a second pinned layer, an anti-ferromagnetic coupling (AFC) spacer layer between the first pinned layer and the second pinned layer, a first spacer layer adjacent to the second pinned layer, a second spacer layer, a ferromagnetic layer sandwiched by the first spacer layer and the second spacer layer, a polarization enhancement layer adjacent to the second spacer layer.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: September 19, 2023
    Assignee: HeFeChip Corporation Limited
    Inventors: Qinli Ma, Youngsuk Choi, Shu-Jen Han
  • Patent number: 11538986
    Abstract: A storage layer of a magnetic tunnel junction (MTJ) element is disclosed. The storage layer having perpendicular magnetic anisotropy includes a first ferromagnetic layer, a first dust layer disposed directly on the first ferromagnetic layer, a second ferromagnetic layer disposed directly on the first dust layer, a second dust layer disposed directly on the second ferromagnetic layer, and a third ferromagnetic layer disposed directly on the second dust layer. A material of the first dust layer is different from a material of the second dust layer.
    Type: Grant
    Filed: April 15, 2020
    Date of Patent: December 27, 2022
    Assignee: HeFeChip Corporation Limited
    Inventors: Qinli Ma, Wei-Chuan Chen, Shu-Jen Han
  • Patent number: 11456411
    Abstract: A method for fabricating a magnetic tunneling junction (MTJ) element is disclosed. A substrate is provided. A reference layer is formed on the substrate. A tunnel barrier layer is formed on the reference layer. A free layer is formed on the tunnel barrier layer. A composite capping layer is formed on the free layer. The composite capping layer comprises an amorphous layer, a light-element sink layer, and/or a diffusion-stop layer. The reference layer, the tunnel barrier layer, the free layer, and the composite capping layer constitute an MTJ stack.
    Type: Grant
    Filed: September 18, 2019
    Date of Patent: September 27, 2022
    Assignee: HeFeChip Corporation Limited
    Inventors: Qinli Ma, Wei-Chuan Chen, Youngsuk Choi, Shu-Jen Han
  • Patent number: 11342496
    Abstract: A semiconductor memory structure includes a substrate, a magnetic tunneling junction (MTJ) stack disposed on the substrate, and an encapsulation layer surrounding the MTJ stack. The encapsulation layer comprises an outer silicon oxynitride layer with a composition of SiOx1Ny1 and an inner silicon oxynitride layer with a composition of SiOx2Ny2, wherein x1/y1>x2/y2.
    Type: Grant
    Filed: April 29, 2020
    Date of Patent: May 24, 2022
    Assignee: HeFeChip Corporation Limited
    Inventors: Hong-Hui Hsu, Wei-Chuan Chen, Qinli Ma, Shu-Jen Han
  • Publication number: 20210343930
    Abstract: A semiconductor memory structure includes a substrate, a magnetic tunneling junction (MTJ) stack disposed on the substrate, and an encapsulation layer surrounding the MTJ stack. The encapsulation layer comprises an outer silicon oxynitride layer with a composition of SiOx1Ny1 and an inner silicon oxynitride layer with a composition of SiOx2Ny2, wherein x1/y1>x2/y2.
    Type: Application
    Filed: April 29, 2020
    Publication date: November 4, 2021
    Inventors: Hong-Hui Hsu, Wei-Chuan Chen, Qinli Ma, Shu-Jen Han
  • Publication number: 20210328135
    Abstract: A storage layer of a magnetic tunnel junction (MTJ) element is disclosed. The storage layer having perpendicular magnetic anisotropy includes a first ferromagnetic layer, a first dust layer disposed directly on the first ferromagnetic layer, a second ferromagnetic layer disposed directly on the first dust layer, a second dust layer disposed directly on the second ferromagnetic layer, and a third ferromagnetic layer disposed directly on the second dust layer. A material of the first dust layer is different from a material of the second dust layer.
    Type: Application
    Filed: April 15, 2020
    Publication date: October 21, 2021
    Inventors: Qinli Ma, Wei-Chuan Chen, Shu-Jen Han
  • Patent number: 11114605
    Abstract: A composite storage layer for magnetic memory devices includes a first ferromagnetic layer, a tri-layered spacer stack disposed on the first ferromagnetic layer, a second ferromagnetic layer disposed on the tri-layered spacer stack, and an oxide capping layer on the second ferromagnetic layer. The tri-layered spacer stack comprises a first non-magnetic layer, a discontinuous, insulating oxide layer, and a second non-magnetic layer. The discontinuous, insulating oxide layer is sandwiched by the first non-magnetic layer and the second non-magnetic layer.
    Type: Grant
    Filed: August 2, 2019
    Date of Patent: September 7, 2021
    Assignee: HeFeChip Corporation Limited
    Inventors: Qinli Ma, Youngsuk Choi, Shu-Jen Han
  • Publication number: 20210265561
    Abstract: A magnetic tunneling junction (MTJ) element includes a reference layer, a tunnel barrier layer on the reference layer, a free layer on the tunnel barrier layer, and a composite capping layer on the free layer. The composite capping layer comprises a diffusion-stop layer on the free layer, a light-element sink layer on the diffusion-stop layer, and an amorphous layer on the light-element sink layer.
    Type: Application
    Filed: May 9, 2021
    Publication date: August 26, 2021
    Inventors: Qinli Ma, Wei-Chuan Chen, Youngsuk Choi, Shu-Jen Han
  • Publication number: 20210134504
    Abstract: A magnetic tunnel junction (MTJ) element including a free layer, a reference layer; and a tunnel barrier layer between the free layer and the reference layer. The reference layer includes a first pinned layer, a second pinned layer, an anti-ferromagnetic coupling (AFC) spacer layer between the first pinned layer and the second pinned layer, a first spacer layer adjacent to the second pinned layer, a second spacer layer, a ferromagnetic layer sandwiched by the first spacer layer and the second spacer layer, a polarization enhancement layer adjacent to the second spacer layer.
    Type: Application
    Filed: January 15, 2021
    Publication date: May 6, 2021
    Inventors: Qinli Ma, Youngsuk Choi, Shu-Jen Han
  • Publication number: 20210020215
    Abstract: A magnetic tunneling junction (MTJ) element is disclosed. The MTJ element includes a reference layer, a tunnel barrier layer on the reference layer, a free layer on the tunnel barrier layer, and a composite capping layer on the free layer. The composite capping layer includes an amorphous layer, a light-element sink layer, and/or a diffusion-stop layer. The composite capping layer is in direct contact with the free layer and forms a first interface with the free layer. The composite capping layer is in direct contact with a top electrode and forms a second interface with the top electrode.
    Type: Application
    Filed: July 21, 2019
    Publication date: January 21, 2021
    Inventors: Qinli Ma, Wei-Chuan Chen, Youngsuk Choi, Shu-Jen Han
  • Publication number: 20210005809
    Abstract: A method for fabricating a magnetic tunneling junction (MTJ) element is disclosed. A substrate is provided. A reference layer is formed on the substrate. A tunnel barrier layer is formed on the reference layer. A free layer is formed on the tunnel barrier layer. A composite capping layer is formed on the free layer. The composite capping layer comprises an amorphous layer, a light-element sink layer, and/or a diffusion-stop layer. The reference layer, the tunnel barrier layer, the free layer, and the composite capping layer constitute an MTJ stack.
    Type: Application
    Filed: September 18, 2019
    Publication date: January 7, 2021
    Inventors: Qinli Ma, Wei-Chuan Chen, Youngsuk Choi, Shu-Jen Han
  • Patent number: 10650873
    Abstract: A memory array that comprises three dimensionally stacked two-dimensional memory arrays. The memory array includes a first layer and a second layer oriented orthogonal to the first layer. The memory array further includes a magnetic tunnel junction adjacent to each of the first layer and the second layer. The magnetic tunnel junction further includes a first magnetic layer adjacent to the second layer. Additionally, the magnetic tunnel junction includes a second magnetic layer adjacent to the first layer. The magnetic tunnel junction also includes a tunnel layer adjacent to the first magnetic layer and the second magnetic layer.
    Type: Grant
    Filed: June 18, 2018
    Date of Patent: May 12, 2020
    Assignee: Carnegie Mellon University
    Inventors: Jian-Gang Zhu, Chia-Ling Chien, Qinli Ma
  • Publication number: 20200052192
    Abstract: A composite storage layer for magnetic memory devices includes a first ferromagnetic layer, a tri-layered spacer stack disposed on the first ferromagnetic layer, a second ferromagnetic layer disposed on the tri-layered spacer stack, and an oxide capping layer on the second ferromagnetic layer. The tri-layered spacer stack comprises a first non-magnetic layer, a discontinuous, insulating oxide layer, and a second non-magnetic layer. The discontinuous, insulating oxide layer is sandwiched by the first non-magnetic layer and the second non-magnetic layer.
    Type: Application
    Filed: August 2, 2019
    Publication date: February 13, 2020
    Inventors: Qinli Ma, Youngsuk Choi, Shu-Jen Han
  • Publication number: 20200052191
    Abstract: A magnetic tunnel junction (MTJ) element including a free layer, a reference layer; and a tunnel barrier layer between the free layer and the reference layer. The reference layer includes a first pinned layer, a second pinned layer, an anti-ferromagnetic coupling (AFC) spacer layer between the first pinned layer and the second pinned layer, a texture decoupling layer, a polarization enhancement layer, and a coupling enhancement (CE) structure between the texture decoupling layer and the second pinned layer.
    Type: Application
    Filed: August 1, 2019
    Publication date: February 13, 2020
    Inventors: Qinli Ma, Youngsuk Choi, Shu-Jen Han
  • Patent number: 10559747
    Abstract: A magneto-electronic device may include: a spin-orbit torque (SOT) generator layer; a magnetic memory layer; and/or sensing electrodes configured to measure a Hall effect of the magnetic memory layer. The SOT generator layer may include topological insulator material, and the magnetic memory layer may include ferromagnetic material with perpendicular magnetic anisotropy. A magneto-electronic device may include: a spin-orbit torque (SOT) generator layer; a first magnetic memory layer on the SOT generator layer; an insulating layer on the first magnetic memory layer; and/or a second magnetic memory layer on the insulating layer. The SOT generator layer may include topological insulator material. The first magnetic memory layer and the second magnetic memory layer may include ferromagnetic material with either perpendicular magnetic anisotropy or in-plane magnetic anisotropy.
    Type: Grant
    Filed: April 26, 2017
    Date of Patent: February 11, 2020
    Assignee: THE JOHNS HOPKINS UNIVERSITY
    Inventors: Yufan Li, Qinli Ma, Chia-ling Chien
  • Publication number: 20200035910
    Abstract: A magneto-electronic device may include: a spin-orbit torque (SOT) generator layer; a magnetic memory layer; and/or sensing electrodes configured to measure a Hall effect of the magnetic memory layer. The SOT generator layer may include topological insulator material, and the magnetic memory layer may include ferromagnetic material with perpendicular magnetic anisotropy. A magneto-electronic device may include: a spin-orbit torque (SOT) generator layer; a first magnetic memory layer on the SOT generator layer; an insulating layer on the first magnetic memory layer; and/or a second magnetic memory layer on the insulating layer. The SOT generator layer may include topological insulator material. The first magnetic memory layer and the second magnetic memory layer may include ferromagnetic material with either perpendicular magnetic anisotropy or in-plane magnetic anisotropy.
    Type: Application
    Filed: April 26, 2017
    Publication date: January 30, 2020
    Inventors: Yufan Li, Qinli Ma, Chia-ling Chien
  • Publication number: 20180366173
    Abstract: A memory array that comprises three dimensionally stacked two-dimensional memory arrays. The memory array includes a first layer and a second layer oriented orthogonal to the first layer. The memory array further includes a magnetic tunnel junction adjacent to each of the first layer and the second layer. The magnetic tunnel junction further includes a first magnetic layer adjacent to the second layer. Additionally, the magnetic tunnel junction includes a second magnetic layer adjacent to the first layer. The magnetic tunnel junction also includes a tunnel layer adjacent to the first magnetic layer and the second magnetic layer.
    Type: Application
    Filed: June 18, 2018
    Publication date: December 20, 2018
    Inventors: Jian-Gang Zhu, Chia-Ling Chien, Qinli Ma
  • Patent number: 10103321
    Abstract: A magnetoresistive element according to an embodiment includes: a first magnetic layer; a second magnetic layer; a first nonmagnetic layer disposed between the first magnetic layer and the second magnetic layer; and a third magnetic layer disposed between the first magnetic layer and the first nonmagnetic layer, the first magnetic layer containing Mn and at least one of Ge, Ga, or Al, and the third magnetic layer containing Mn2VZ, where V represents vanadium, and Z represents at least one element of Al or Ga.
    Type: Grant
    Filed: September 8, 2016
    Date of Patent: October 16, 2018
    Assignees: KABUSHIKI KAISHA TOSHIBA, TOHOKU UNIVERSITY
    Inventors: Yushi Kato, Tadaomi Daibou, Qinli Ma, Atsushi Sugihara, Shigemi Mizukami, Terunobu Miyazaki
  • Patent number: 9899071
    Abstract: Provided is an electric-current-controllable magnetic unit, including: a substrate, an electric-current channel disposed on the substrate, the electric-current channel including a composite heavy-metal multilayer comprising at least one heavy-metal; a capping layer disposed over the electric-current channel; and at least one ferromagnetic layer disposed between the electric-current channel and the capping layer.
    Type: Grant
    Filed: January 20, 2017
    Date of Patent: February 20, 2018
    Assignee: THE JOHNS HOPKINS UNIVERSITY
    Inventors: Qinli Ma, Yufan Li, Chia-ling Chien