Patents by Inventor Qiquan Geng

Qiquan Geng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Simultaneous selective polymer deposition and etch pitch doubling for sub 50nm line/space patterning
    Patent number: 7531102
    Abstract: First radicals and second radicals are simultaneous deposited into a space defined by two adjacent lines of photoresists and an underlying layer. A portion of the first radicals and the second radicals combine to form a polymer layer on the layer in the center of the space, and substantially simultaneously, another portion of thee first radicals remove the underlying layer near the base of the photoresists. The first radicals may be fluorine-rich and the second radicals may be carbon-rich.
    Type: Grant
    Filed: March 31, 2006
    Date of Patent: May 12, 2009
    Assignee: Intel Corporation
    Inventors: Qiquan Geng, Jeff J Xu, Everett B Lee, Michael T Ru, Hsu-en Yang, Chung Hui
  • Simultaneous selective polymer deposition and etch pitch doubling for sub 50nm line/space patterning
    Publication number: 20070228002
    Abstract: First radicals and second radicals are simultaneous deposited into a space defined by two adjacent lines of photoresists and an underlying layer. A portion of the first radicals and the second radicals combine to form a polymer layer on the layer in the center of the space, and substantially simultaneously, another portion of thee first radicals remove the underlying layer near the base of the photoresists. The first radicals may be fluorine-rich and the second radicals may be carbon-rich.
    Type: Application
    Filed: March 31, 2006
    Publication date: October 4, 2007
    Inventors: Qiquan Geng, Jeff Xu, Everett Lee, Michael Ru, Hsu-en Yang, Chung Hui
  • Apparatus for measuring weak static magnetic field using superconduction strips and a SQUID magnetometer
    Patent number: 5184072
    Abstract: A magnetic field measurement system including a pick-up coil is not moved but fixed. Strips of superconducting material are arranged in a plane with narrow slits between the strips. The strips are moved very near the pick-up coil along the plane. From output variations of a SQUID magnetometer during the movement, a magnitude of a static field perpendicular to the plane of the strips is obtained.
    Type: Grant
    Filed: September 19, 1991
    Date of Patent: February 2, 1993
    Assignees: Research Development Corporation, Junpei Yuyama, Qiquan Geng
    Inventors: Junpei Yuyama, Qiquan Geng, Kazunori Chihara, Hirofumi Minami, Eiichi Goto
  • Refrigerator
    Patent number: 5181383
    Abstract: In a refrigerator having a compressor settled in a room temperature portion and an expander which is connected to the room temperature portion, a piston of the expander is settled in the room temperature portion and pressure variation at a low temperature portion is transferred to the piston through a gas column in a pipe connecting the room temperature portion and the low temperature portion.
    Type: Grant
    Filed: June 28, 1991
    Date of Patent: January 26, 1993
    Assignees: Research Development Corporation of Japan, Junpei Yuyama
    Inventors: Eiichi Goto, Qiquan Geng, Junpei Yuyama