Abstract: Disclosed are a target holder assembly of an ion probe and a method for preparing a sample target thereof. Specifically, the target holder assembly includes a body and sheets, a middle part of the body is provided with a sample target hole, and limiting portions are symmetrically arranged at an opening of the sample target hole away from a sample target entry side; and the sheets match the limiting portions in shape and dimension to form recesses on a sample target for receiving the limiting portions.

Abstract: Disclosed are a target holder assembly of an ion probe and a method for preparing a sample target thereof. Specifically, the target holder assembly includes a body and sheets, a middle part of the body is provided with a sample target hole, and limiting portions are symmetrically arranged at an opening of the sample target hole away from a sample target entry side; and the sheets match the limiting portions in shape and dimension to form recesses on a sample target for receiving the limiting portions.

Abstract: A method and system for measuring an inert gas by an ion probe. Embedding a to-be-measured sample into an epoxy resin, to obtain a sample target, where the to-be-measured sample includes an inert gas atom; after putting the obtained sample target into an analysis chamber of the ion probe, vacuumizing the analysis chamber, where the ion probe includes a primary ion source, an electron gun, a mass analyzer, and an ion detector; bombarding the sample target by using a primary ion beam formed by the primary ion source to release the inert gas atom in the sample target; ionizing the released inert gas atom by using an electron beam formed by the electron gun to form an inert gas ion; and analyzing a secondary ion containing the inert gas ion by using the mass analyzer and the ion detector to achieve measurement of the inert gas.

Abstract: A method and system for measuring an inert gas by an ion probe. Embedding a to-be-measured sample into an epoxy resin, to obtain a sample target, where the to-be-measured sample includes an inert gas atom; after putting the obtained sample target into an analysis chamber of the ion probe, vacuumizing the analysis chamber, where the ion probe includes a primary ion source, an electron gun, a mass analyzer, and an ion detector; bombarding the sample target by using a primary ion beam formed by the primary ion source to release the inert gas atom in the sample target; ionizing the released inert gas atom by using an electron beam formed by the electron gun to form an inert gas ion; and analyzing a secondary ion containing the inert gas ion by using the mass analyzer and the ion detector to achieve measurement of the inert gas.