Patents by Inventor Qixin Xu

Qixin Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220145023
    Abstract: The disclosure relates to the field of electronic materials, and in particular to a composite film of fluorinated polybenzoxazole (6FPBO) and triple-shelled mesoporous silica hollow spheres, and to its preparation and use. The composite film comprises fluorinated polybenzoxazole as a matrix and amino-functionalized triple-shelled mesoporous silica hollow spheres which are dispersed in the fluorinated polybenzoxazole matrix. A mass ratio of (amino-functionalized triple-shelled mesoporous silica hollow spheres)/(fluorinated polybenzoxazole) is 1/100 to 5/100. The composite film has excellent thermal stability and a lower dielectric constant.
    Type: Application
    Filed: November 1, 2021
    Publication date: May 12, 2022
    Applicant: East China University of Science and Technology
    Inventors: Qixin ZHUANG, Zhe ZHANG, Xiaoyun LIU, Jian XU, Wentao WANG, Zeyang WU, Xiaohan WU, Lihui LI
  • Patent number: 11107717
    Abstract: A cassette transport device is disclosed which includes a smart cart, a base expansion frame mounted on the smart cart and a cassette-loading frame fixed to the base expansion frame. The cassette-loading frame is partitioned into several segments each accommodating a plurality of cassette trays. Each of the cassette trays defines, on its surface, a first trough and a second trough in the first trough. The first trough is configured to retain a cassette of a first size, and the second trough is configured to retain a cassette of a second size. With the first and second troughs, each of the cassette trays is able to retain a cassette of either the first or second size, making the cassette transport device possible to be used in transportation of the both types of cassettes with a high yield. Moreover, the smart cart is capable of automated transportation without human intervention or track construction while enabling savings in transportation cost, time and labor.
    Type: Grant
    Filed: April 28, 2017
    Date of Patent: August 31, 2021
    Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    Inventors: Lingyu Li, Qixin Xu
  • Publication number: 20200219743
    Abstract: A wafer transfer cassette and an automated wafer transfer system. The wafer transfer cassette includes a wafer storage frame configured to accommodate wafers, a base, a casing, a cover and a rotary coupling mechanism. The base and the casing are fixedly connected to each other and together define a cavity in which the wafer storage frame is accommodated. The casing defines an opening through which a wafer can be placed in or taken out. The cover is pivotally coupled to the casing by means of the rotary coupling mechanism so that when the rotary coupling mechanism is rotated, the cover slides on the base and thus opens or closes the opening.
    Type: Application
    Filed: June 19, 2018
    Publication date: July 9, 2020
    Inventors: Jing ZHEN, Qixin XU, Gang WANG, Li ZHANG, Xinjiang LONG, Xiping CHEN
  • Publication number: 20190206709
    Abstract: A cassette transport device is disclosed which includes a smart cart, a base expansion frame mounted on the smart cart and a cassette-loading frame fixed to the base expansion frame. The cassette-loading frame is partitioned into several segments each accommodating a plurality of cassette trays. Each of the cassette trays defines, on its surface, a first trough and a second trough in the first trough. The first trough is configured to retain a cassette of a first size, and the second trough is configured to retain a cassette of a second size. With the first and second troughs, each of the cassette trays is able to retain a cassette of either the first or second size, making the cassette transport device possible to be used in transportation of the both types of cassettes with a high yield. Moreover, the smart cart is capable of automated transportation without human intervention or track construction while enabling savings in transportation cost, time and labor.
    Type: Application
    Filed: April 28, 2017
    Publication date: July 4, 2019
    Inventors: Lingyu LI, Qixin XU
  • Publication number: 20190152721
    Abstract: A robotic manipulator for handling a cassette and an automated cassette transport device are disclosed, the device including a mechanical arm (1), an end actuator (2) at an end of the mechanical arm (1) and a vision-based locating assembly (3) on the end actuator (2). On the one hand, the vision-based locating assembly (3) can determine the position of a flange of the cassette, thereby identifying the cassette. In other words, the cassette can be identified based on a feature of the cassette itself. This dispense with a separate locating marker while improving cassette measuring and handling accuracy. On the other hand, transportation of the cassette is allowed by complementary retention of its flange on a recessed surface of the end actuator (2).
    Type: Application
    Filed: April 28, 2017
    Publication date: May 23, 2019
    Inventors: Qixin XU, Rong DU, Lingyu LI
  • Patent number: 9195146
    Abstract: An interference exposure device, including: a light source (100) for providing an exposure light beam; a light homogenizer-collimator (200) for homogenizing and collimating the exposure light beam; an interference unit (300) including at least two gratings (303) for converting the exposure light beam into at least two coherent light beams and making the coherent light beams converge on a substrate surface to form thereon an interference exposure pattern, the gratings (303) each having a period and being distributed in correspondence with a desired exposure pattern; a driving and supporting means (406) for supporting and carrying the substrate to move with at least three degrees of freedom; and a measuring element (500) for measuring an angle between coordinate systems of the interference unit (300) and the means (406) to adjust an exposure position of the means (406) based on a measurement result of the measuring element (500) before exposing the substrate.
    Type: Grant
    Filed: August 16, 2012
    Date of Patent: November 24, 2015
    Assignee: SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD.
    Inventors: Qixin Xu, Fan Wang
  • Publication number: 20140176925
    Abstract: An interference exposure device, including: a light source (100) for providing an exposure light beam; a light homogenizer-collimator (200) for homogenizing and collimating the exposure light beam; an interference unit (300) including at least two gratings (303) for converting the exposure light beam into at least two coherent light beams and making the coherent light beams converge on a substrate surface to form thereon an interference exposure pattern, the gratings (303) each having a period and being distributed in correspondence with a desired exposure pattern; a driving and supporting means (406) for supporting and carrying the substrate to move with at least three degrees of freedom; and a measuring element (500) for measuring an angle between coordinate systems of the interference unit (300) and the means (406) to adjust an exposure position of the means (406) based on a measurement result of the measuring element (500) before exposing the substrate.
    Type: Application
    Filed: August 16, 2012
    Publication date: June 26, 2014
    Applicant: Shanghai Micro Electronics Equipment Co., Ltd
    Inventors: Qixin Xu, Fan Wang