Abstract: The disclosure describes an improved drop-on-demand, controlled volume technique for dispensing resist onto a substrate, which is then imprinted to create a patterned optical device suitable for use in optical applications such as augmented reality and/or mixed reality systems. The technique enables the dispensation of drops of resist at precise locations on the substrate, with precisely controlled drop volume corresponding to an imprint template having different zones associated with different total resist volumes. Controlled drop size and placement also provides for substantially less variation in residual layer thickness across the surface of the substrate after imprinting, compared to previously available techniques. The technique employs resist having a refractive index closer to that of the substrate index, reducing optical artifacts in the device.

Abstract: Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.

Abstract: The disclosure describes an improved drop-on-demand, controlled volume technique for dispensing resist onto a substrate, which is then imprinted to create a patterned optical device suitable for use in optical applications such as augmented reality and/or mixed reality systems. The technique enables the dispensation of drops of resist at precise locations on the substrate, with precisely controlled drop volume corresponding to an imprint template having different zones associated with different total resist volumes. Controlled drop size and placement also provides for substantially less variation in residual layer thickness across the surface of the substrate after imprinting, compared to previously available techniques. The technique employs resist having a refractive index closer to that of the substrate index, reducing optical artifacts in the device.

Abstract: Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.

Abstract: The disclosure describes an improved drop-on-demand, controlled volume technique for dispensing resist onto a substrate, which is then imprinted to create a patterned optical device suitable for use in optical applications such as augmented reality and/or mixed reality systems. The technique enables the dispensation of drops of resist at precise locations on the substrate, with precisely controlled drop volume corresponding to an imprint template having different zones associated with different total resist volumes. Controlled drop size and placement also provides for substantially less variation in residual layer thickness across the surface of the substrate after imprinting, compared to previously available techniques. The technique employs resist having a refractive index closer to that of the substrate index, reducing optical artifacts in the device.

Abstract: Thermoelectric devices and methods for making and using the devices and their intermediates are provided. Membrane-supported thermoelectric modules are fabricated by dispensing thermoelectric powder into select locations of a membrane to form electrically isolated columns of thermoelectric material. The powder is then sintered or fused to form thermoelectric elements, which are then electrically connected and combined with thermal interface films to form the modules. The modules are the building blocks of electrical current generating, thermoelectric cooling and heat scavenging thermoelectric devices.

Abstract: Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.

Abstract: Methods and systems for manufacturing an optical waveguide include depositing an adhesion promoting layer on a substrate. Multiple curable resist droplets are dispensed on the adhesion promoting layer. The adhesion promoting layer is disposed between and contacts the substrate and the curable resist droplets. The curable resist droplets define an optical eyepiece layer such that a zero residual layer thickness (RLT) region of the optical eyepiece layer is free of the curable resist droplets. The optical eyepiece layer is incised from the substrate to form the optical waveguide.

Abstract: The disclosure relates to methods for the fabrication of randomly arranged, antireflective structures on surfaces of optical substrates and to optics having antireflective coatings comprising random surface structures.

Abstract: Thermoelectric devices and methods for making and using the devices and their intermediates are provided. Membrane-supported thermoelectric modules are fabricated by dispensing thermoelectric powder into select locations of a membrane to form electrically-isolated columns of thermoelectric material. The powder is then sintered or fused to form thermoelectric elements, which are then electrically connected and combined with thermal interface films to form the modules. The modules are the building blocks of electrical current generating, thermoelectric cooling and heat scavenging thermoelectric devices.

Abstract: Ferroelectric rare-earth manganese-titanium oxides and methods of their manufacture. The ferroelectric materials can provide nonvolatile data storage in rapid access memory devices.

Abstract: Novel metal oxide compositions are disclosed. These ferromagnetic or ferrimagnetic compositions have resitivities that vary between those of semiconducting and insulating materials, and they further exhibit Curie temperatures greater than room temperature (i.e., greater than 300 K). They are perovskite structures with the general chemical formulas (A1-xMx)BO3, (A1-xMx)(B?B?)O3 or A(B1-xMx)O3, where A can be a 1+, 2+ and 3+ charged ion; B can be a 5+, 4+, 3+ charged ion; B? and B? can be 2+, 3+, 4+, 5+ and 6+ charged ion. M is a magnetic ion dopant. X-ray diffraction patterns are presented for exemplary compositions.

Abstract: Disclosed herein are systems and methods of a combinatorial synthesis technique that produces functional materials from a plurality of chemical elements with a compositional gradient either continuously varying across the sample, or where the mole fractions are discretely varied. A contactless heating mechanism, such as a pulsed laser, provides in situ thermal activation necessary for promoting and controlling reaction between precursors, inter-diffusion of precursor atoms, and thermal annealing that is essential for crystallization of deposited materials. The heating may be spot selective and temperature variable so that the required thermal annealing may be conducted in a combinatorial manner.

Abstract: Ferroelectric rare-earth manganese-titanium oxides and methods of their manufacture. The ferroelectric materials can provide nonvolatile data storage in rapid access memory devices.

Abstract: Ferroelectric rare-earth manganese-titanium oxides and methods of their manufacture. The ferroelectric materials can provide nonvolatile data storage in rapid access memory devices.

Abstract: This invention provides gradient deposition methods and systems to form libraries of combinatorial materials. The systems can include a shutter movable between alternate orientations around a substrate for deposition of gradients in different directions. Methods can include deposition of a gradient from targets illuminated by controlling target bias voltage onto a substrate past a mask or shutter movable to desired orientation coordinates.

Abstract: Ferroelectric rare-earth manganese-titanium oxides and methods of their manufacture. The ferroelectric materials can provide nonvolatile data storage in rapid access memory devices.