Patents by Inventor Qu Jun

Qu Jun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8821701
    Abstract: A target for use in an ion beam sputtering apparatus made of at least two target tiles where at least two of the target tiles are made of different chemical compositions and are mounted on a main tile and geometrically arranged on the main tile to yield a desired chemical composition on a sputtered substrate. In an alternate embodiment, the tiles are of varied thickness according to the desired chemical properties of the sputtered film. In yet another alternate embodiment, the target is comprised of plugs pressed in a green state which are disposed in cavities formed in a main tile also formed in a green state and the assembly can then be compacted and then sintered.
    Type: Grant
    Filed: June 2, 2010
    Date of Patent: September 2, 2014
    Inventors: Clifton Higdon, Alaa A. Elmoursi, Jason Goldsmith, Bruce Cook, Peter Blau, Qu Jun, Robert Milner
  • Publication number: 20110297535
    Abstract: A target for use in an ion beam sputtering apparatus made of at least two target tiles where at least two of the target tiles are made of different chemical compositions and are mounted on a main tile and geometrically arranged on the main tile to yield a desired chemical composition on a sputtered substrate. In an alternate embodiment, the tiles are of varied thickness according to the desired chemical properties of the sputtered film. In yet another alternate embodiment, the target is comprised of plugs pressed in a green state which are disposed in cavities formed in a main tile also formed in a green state and the assembly can then be compacted and then sintered.
    Type: Application
    Filed: June 2, 2010
    Publication date: December 8, 2011
    Inventors: Clifton Higdon, Alaa A. Elmoursi, Jason Goldsmith, Bruce Cook, Peter Blau, Qu Jun, Robert Milner