Patents by Inventor Quancheng Gu

Quancheng Gu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Oxygen plasma clean to remove carbon species deposited on a glass dome surface
    Patent number: 7550090
    Abstract: A method for in-situ cleaning of a dielectric dome surface having been used in pre-clean processes is provided. Carbon containing deposits are removed by providing a plasma of one or more oxidizing gases which react with the carbon containing films to form volatile carbon containing compounds.
    Type: Grant
    Filed: January 23, 2007
    Date of Patent: June 23, 2009
    Assignee: Applied Materials, Inc.
    Inventors: Quancheng Gu, Cheng-Hsiung Tsai, John C. Forster, Xiaoxi Guo, Larry Frazier
  • OXYGEN PLASMA CLEAN TO REMOVE CARBON SPECIES DEPOSITED ON A GLASS DOME SURFACE
    Publication number: 20080173326
    Abstract: A method for in-situ cleaning of a dielectric dome surface having been used in pre-clean processes is provided. Carbon containing deposits are removed by providing a plasma of one or more oxidizing gases which react with the carbon containing films to form volatile carbon containing compounds.
    Type: Application
    Filed: January 23, 2007
    Publication date: July 24, 2008
    Inventors: QUANCHENG GU, Cheng-Hsiung Tsai, John C. Forster, Xiaoxi Guo, Larry Frazier