Abstract: A method for producing a measuring device (10) with a microflow channel (22) is provided. The device (10) includes an electrical sensing module (30) including at least two electrodes (32, 34) for characterizing objects in fluid flow. The method involves preparation of an SOI substrate (100) including top and bottom semiconductor layers (90, 50) and an intermediate oxide layer (70). The top layer is patterned to form a cavity defining the flow channel, the electrodes and a gap (92) adjacent to the respective electrodes along the flow channel. Then an insulating material (80, 82) is applied to each gap to form an insulating filling (81) for electrically insulating the electrical sensing module from the remaining top layer. The corresponding measuring device (10) is also provided.