Patents by Inventor Quirin W. Matthys

Quirin W. Matthys has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reduced footprint tool for automated processing of microelectronic substrates
    Patent number: 7134827
    Abstract: The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
    Type: Grant
    Filed: September 28, 2004
    Date of Patent: November 14, 2006
    Assignee: FSI International, Inc.
    Inventors: Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Todd K. Maciej, Quirin W. Matthys
  • Reduced footprint tool for automated processing of microelectronic substrates
    Patent number: 6979165
    Abstract: The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: December 27, 2005
    Assignee: FSI International, Inc.
    Inventors: Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Todd K. Maciej, Quirin W. Matthys
  • Reduced footprint tool for automated processing of microelectronic substrates
    Publication number: 20030091410
    Abstract: The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
    Type: Application
    Filed: November 12, 2002
    Publication date: May 15, 2003
    Inventors: Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Todd K. Maciej, Quirin W. Matthys