Abstract: A topographic measurement method includes provision of a sample including first surface provided with plurality of salient patterns. The first surface of the sample is illuminated by means of structured light that defines several repetitive patterns. The structured light is emitted at first angle with respect to first surface. A first image of first surface of sample illuminated by structured light is acquired. The first image is acquired at second angle with respect to first surface. A second image of illuminated sample is acquired. The second image differs from first image by value of exposure time. The first image is compared with second image to determine presence of at least one artefact on the first image. A reference image is formed from the first image and the second image. The reference image is devoid of any artefact. A quantity representative of the first surface is calculated from the reference image.

Abstract: A device for measuring the surface topography of a sample includes a projector which projects a structured image onto the surface of the sample. A camera observes the image projected onto the surface of the sample. A heating device applies a temperature ramp on the sample. A first optic device located on the optic axis of the projector modifies the image emitted by the projector and applies it on the sample. The first optic device includes several distinct lenses defining different magnifications. The lenses are fitted movable with respect to one another. A second optic device is located on the optic axis of the camera to modify the size of the observation area on the surface of the sample. The second optic device includes several distinct lenses presenting different magnifications. The lenses are fitted movable to define several observation areas of different sizes.

Abstract: A device for measuring the surface topography of a sample includes a projector which projects a structured image onto the surface of the sample. A camera observes the image projected onto the surface of the sample. A heating device applies a temperature ramp on the sample. A first optic device located on the optic axis of the projector modifies the image emitted by the projector and applies it on the sample. The first optic device includes several distinct lenses defining different magnifications. The lenses are fitted movable with respect to one another. A second optic device is located on the optic axis of the camera to modify the size of the observation area on the surface of the sample. The second optic device includes several distinct lenses presenting different magnifications. The lenses are fitted movable to define several observation areas of different sizes.