Abstract: A post metal chemical-mechanical planarization (CMP) cleaning process for advanced interconnect technology is provided. The process, which follows CMP, combines an acidic clean and a basic clean in sequence. The process can achieve a more than 60% reduction in CMP defects, such as polish residues, foreign materials, slurry abrasives, scratches, and hollow metal, relative to an all-basic clean process. The process also eliminates the circular ring defects that occur intermittently during roller brush cleans within a roller brush clean module.

Abstract: A post metal chemical-mechanical planarization (CMP) cleaning process for advanced interconnect technology is provided. The process, which follows CMP, combines an acidic clean and a basic clean in sequence. The process can achieve a more than 60% reduction in CMP defects, such as polish residues, foreign materials, slurry abrasives, scratches, and hollow metal, relative to an all-basic clean process. The process also eliminates the circular ring defects that occur intermittently during roller brush cleans within a roller brush clean module.

Abstract: The invention relates to an improved mixing arrangement for, primarily, moving bitumen in steam from sources of such bitumen and steam to a reactor or coker for further processing of the bitumen into petroleum products. The invention provides a main conduit connected to an atomizing nozzle mounted in a wall of the reactor and first and second conduits for flowing bitumen and steam respectively into the main conduit. The first conduit is angled relative to the main conduit at an acute angle of about 45° and the second conduit is angled relative to the main conduit at an acute angle of about 30°. The second conduit is positioned downstream of the first conduit by a short distance of about 23 mm and may be angled radially relative to the first conduit by any angle, although a 90° angle is preferred. A flow accelerating nozzle is located in the second conduit adjacent the entrance therefrom into the main conduit.

Abstract: A medical instrument apparatus for forming and enlarging percutaneous penetrations comprising an elongate dilation tube (expandable sheath), silicone insert and 12′ polyvinyl coated copper wire. The expandable sheath is radially expandable from a small diameter configuration to a large diameter configuration capable of receiving an external stationary tube, for example, a debriding apparatus. The external stationary tube contacts a metal tab housed in the silicone insert which is attached to the 12′ electrical cord, allowing an electrical current to pass down the external stationary metal tube thereby becoming the cauterizing instrument to coagulate hemorrhage in the operative field (joint).

Abstract: A method of providing a computer-aided project notebook for use on a computer system programmed with collaboration software (11). A database (11b) stores forms for documents comprising the notebook. The forms are categorized into views, such as a methodology view that sorts documents by status (FIG. 3). Methodology documents have status fields, into which a user may enter status data. After status data is entered, the document will appear in the correct view (FIG. 5). Other features of the notebook are document interconnectivity, shared fields, trace maps, and document access especially designed for project development.